Patent US3391071A successfully refreshed from Google Patents.
US3391071A
Expired / Lapsed
US
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Method of sputtering highly pure refractory metals in an anodically biased chamber
Assignee: AT&T Inc
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Filing: 1966-08-04
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Granted: 1968-07-02
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Expires: 1986-08-04
Abstract
No abstract record available.
Inventors
- 👤 Henry C Theuerer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 14:59
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/3464; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-07-02 | 1972-01-01 | 1972-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-07-02 | 1976-01-01 | 1976-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-07-02 | 1980-01-01 | 1980-07-02 | $7700.00 | Window Closed / Lapsed |