US3391071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of sputtering highly pure refractory metals in an anodically biased chamber
Assignee: AT&T Inc
•
Filing: 1966-08-04
•
Granted: 1968-07-02
•
Expires: 1986-08-04
Abstract
No abstract record available.
Inventors
- 👤 Henry C Theuerer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 08:01
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/3464; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-07-02 | 1972-01-01 | 1972-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-07-02 | 1976-01-01 | 1976-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-07-02 | 1980-01-01 | 1980-07-02 | $7700.00 | Window Closed / Lapsed |