US3381369A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of electrically isolating semiconductor circuit components
Assignee: RCA Corp
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Filing: 1966-02-17
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Granted: 1968-05-07
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Expires: 1986-02-17
Abstract
No abstract record available.
Inventors
- 👤 Arthur I Stoller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 14:58
CPC Classifications
H; H10; H10W; H10W10/00; H10P; H10P10/00; H10P95/00; H10W10/01; H10W10/011; H10W10/10; H01; H01H; H01H3/00; H01H3/02; H01H3/0253; Y; Y10; Y10S; Y10S148/00; Y10S148/085; Y10S438/00; Y10S438/928
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
100 words
A METHOD OF FABRICATING AN ASSEMBLY WHICH INCLUDES A PLURALITY OF ELECTRICALLY ISOLATED SEMICONDUCTOR PORTIONS, COMPRISING: (A) FORMING A GROOVE WITHIN A FRONT SURFACE OF A SEMICONDUCTOR WAFER TO PROVIDE A PLURALITY OF PROTRUDING PORTIONS, (B) FORMING A HOLE TO EXTEND FROM THE BOTTOM OF SAID GROOVE THROUGH THE REMAINING THICKNESS OF THE WAFER, (C) DEPOSITING INSULATING MATERIAL WITHIN SAID GROOVE BY FORCING IT THROUGH SAID HOLE FROM THE BACK SIDE OF SAID WAFER, AND (D) REMOVING THE BACK PORTION OF THE WAFER TO A DEPTH SUFFICIENT TO LEAVE SAID PROTRUDING PORTIONS ISOLATED FROM EACH OTHER BY SAID INSULATING MATERIAL.
Claim 2
Independent Claim
100 words
A METHOD OF FABRICATING AN ASSEMBLY WHICH INCLUDES A PLURALITY OF ELECTRICALLY ISOLATED SEMICONDUCTOR PORTIONS, COMPRISING: (A) FORMING A GROOVE WITHIN A FRONT SURFACE OF A SEMICONDUCTOR WAFER TO PROVIDE A PLURALITY OF PROTRUDING PORTIONS, (B) FORMING A HOLE TO EXTEND FROM THE BOTTOM OF SAID GROOVE THROUGH THE REMAINING THICKNESS OF THE WAFER, (C) DEPOSITING INSULATING MATERIAL WITHIN SAID GROOVE BY FORCING IT THROUGH SAID HOLE FROM THE BACK SIDE OF SAID WAFER, AND (D) REMOVING THE BACK PORTION OF THE WAFER TO A DEPTH SUFFICIENT TO LEAVE SAID PROTRUDING PORTIONS ISOLATED FROM EACH OTHER BY SAID INSULATING MATERIAL.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-05-07 | 1971-11-06 | 1972-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-05-07 | 1975-11-06 | 1976-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-05-07 | 1979-11-06 | 1980-05-07 | $7700.00 | Window Closed / Lapsed |