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US3375110A Expired / Lapsed US ⏱️ 0.0 years remaining

Photo-masking system using p-xylylene polymers

Assignee: Union Carbide Corp
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Filing: 1964-12-24
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Granted: 1968-03-26
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Expires: 1984-12-24
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Abstract

No abstract record available.

Inventors

  • 👤 William E Loeb

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 13:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; C; C08; C08G; C08G61/00; C08G61/02; C08G61/025; C08G2261/00; C08G2261/30; C08G2261/34; C08G2261/342; C08G2261/3424

Claims Analysis

Total Claims: 1
Claim 1
Independent Claim 24 words
METHOD FOR SELECTIVELY ETCHING SUBSTRATE SURFACES WHICH COMPRISES: (A) MAKING AN ETCHABLE SUBSTRATE COATED WITH A SUBSTANTIALLY UNSATURATED P-XYLYLENE POLYMER HAVING THE REPEATING UNIT:

References Cited (Backward Citations)

US2892712A Cited
US2914489A Cited
US3294531A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1971-03-26 1971-09-25 1972-03-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1975-03-26 1975-09-25 1976-03-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1979-03-26 1979-09-25 1980-03-26 $7700.00 Window Closed / Lapsed

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