← Back to Patent Explorer
US3372067A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of forming a semiconductor by masking and diffusion

Assignee: Telefunken Electronic GmbH
•
Filing: 1964-02-25
•
Granted: 1968-03-05
•
Expires: 1984-02-25
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

No abstract record available.

Inventors

  • 👤 Schafer Horst

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 20:18
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; C; C23; C23C; C23C26/00; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6322; H10P14/6324; H10P14/6938; H10P14/6939; H10P14/69391; H10P14/69395; H10P76/00; H10P76/40; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/049; Y10S148/059; Y10S148/072; Y10S148/106; Y10S148/117; Y10S438/00; Y10S438/914; Y10S438/923; Y10S438/942; Y10S438/945

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 126 words
A METHOD OF MAKING A TRANSISTOR, COMPRISING THE STEPS OF: APPLYING ONTO A SEMICONDUCTOR BODY MADE OF A MATERIAL SELECTED FROM THE GROUP CONSISTING OF GERMANIUM AND THE GROUP 3- GROUP 5 COMPOUNDS A LAYER OF SILICON IN ELEMENTAL FORM; OXIDIZING THE SILICON LAYER THROUGHOUT A PORTION OF ITS THICKNESS; ETCHING A BASE-DIFFUSION WINDOW THROUGH THE SILICON OXIDE LAYER; DIFFUSING IMPURITIES THROUGH SAID WINDOW AND THROUGH THE REMAINING SILICON LAYER INTO THE SEMICONDUCTOR BODY FOR FORMING THE BASE ZONE; THEREAFTER AGAIN OXIDIZING THE REMAINING SILICON LAYER THROUGHOUT AT LEAST A PORTION OF ITS THICKNESS; ETCHING AN EMITTER-DIFFUSION WINDOW THROUGH THE LASTCREATED SILICON OXIDE LAYER; AND DIFFUSING IMPURITIES THROUGH SAID LAST-MENTIONED WINDOW AND THROUGH ANY REMAINING SILICON LAYER INTO THE SEMICONDUCTOR BODY FOR FORMING THE EMITTER ZONE.
Claim 2
Independent Claim 126 words
A METHOD OF MAKING A TRANSISTOR, COMPRISING THE STEPS OF: APPLYING ONTO A SEMICONDUCTOR BODY MADE OF A MATERIAL SELECTED FROM THE GROUP CONSISTING OF GERMANIUM AND THE GROUP 3- GROUP 5 COMPOUNDS A LAYER OF SILICON IN ELEMENTAL FORM; OXIDIZING THE SILICON LAYER THROUGHOUT A PORTION OF ITS THICKNESS; ETCHING A BASE-DIFFUSION WINDOW THROUGH THE SILICON OXIDE LAYER; DIFFUSING IMPURITIES THROUGH SAID WINDOW AND THROUGH THE REMAINING SILICON LAYER INTO THE SEMICONDUCTOR BODY FOR FORMING THE BASE ZONE; THEREAFTER AGAIN OXIDIZING THE REMAINING SILICON LAYER THROUGHOUT AT LEAST A PORTION OF ITS THICKNESS; ETCHING AN EMITTER-DIFFUSION WINDOW THROUGH THE LASTCREATED SILICON OXIDE LAYER; AND DIFFUSING IMPURITIES THROUGH SAID LAST-MENTIONED WINDOW AND THROUGH ANY REMAINING SILICON LAYER INTO THE SEMICONDUCTOR BODY FOR FORMING THE EMITTER ZONE.

References Cited (Backward Citations)

US2739276A Cited
US2827401A Cited
US2981646A Cited
US3055776A Cited
US3221199A Cited
US3139361A Cited
US3200019A Cited
US3158505A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1971-03-05 1971-09-04 1972-03-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1975-03-05 1975-09-04 1976-03-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1979-03-05 1979-09-04 1980-03-05 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag