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US3200019A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for making a semiconductor device

Assignee: RCA Corp
•
Filing: 1962-01-19
•
Granted: 1965-08-10
•
Expires: 1982-01-19
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Abstract

No abstract record available.

Inventors

  • 👤 Jr Joseph H Scott
  • 👤 Olmstead John

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 13:06
CPC Classifications
H; H10; H10P; H10P95/00; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; H10D; H10D99/00; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6922; H10P14/6923; H10P32/00; H10P32/10; H10P32/14; H10P32/1408; H10P32/141; H10P32/17; H10P32/171; H10P32/174; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/118; Y10S148/145; Y10S252/00; Y10S252/95; Y10S252/951

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 117 words
THE METHOD OF FABRICATING A SEMICONDUCTOR DEVICE, COMPRISING THE STEPS OF: PREPARING A SEMICONDUCTOR BODY; VAPORIZING A MIXTURE CONSISTING OF AN ORGANIC SILOXANE COMPOUND AND A VOLATILE SUBSTANCE CAPABLE OF MODIFYING THE CONDUCTIVITY TYPE OF SAID SEMICONDUCTOR BODY; HEATING SAID SEMICONDUCTOR BODY IS THE MIXED VAPORS OF SAID SILOXANE COMPOUND AND SAID CONDUCTIVITY MODIFIER TO A TEMPERATURE BELOW THE MELTING POINT OF SAID SEMICONDUCTIVE BODY BUT ABOVE THE TEMPERATURE AT WHICH SAID SILOXANE COMPOUND DECOMPOSES TO DEPOSIT ON THE SURFACE OF SAID BODY A COATING CONSISTING OF SILICON OXIDE CONTAINING SAID CONDUCTIVITY MODIFIER; AND, HEATING SAID COATED SEMICONDUCTIVE BODY TO DIFFUSE SAID MODIFIER FROM SAID COATING INTO THAT PORTION ONLY OF SAID BODY IMMEDIATELY BENEATH SAID COATING.
Claim 2
Independent Claim 117 words
THE METHOD OF FABRICATING A SEMICONDUCTOR DEVICE, COMPRISING THE STEPS OF: PREPARING A SEMICONDUCTOR BODY; VAPORIZING A MIXTURE CONSISTING OF AN ORGANIC SILOXANE COMPOUND AND A VOLATILE SUBSTANCE CAPABLE OF MODIFYING THE CONDUCTIVITY TYPE OF SAID SEMICONDUCTOR BODY; HEATING SAID SEMICONDUCTOR BODY IS THE MIXED VAPORS OF SAID SILOXANE COMPOUND AND SAID CONDUCTIVITY MODIFIER TO A TEMPERATURE BELOW THE MELTING POINT OF SAID SEMICONDUCTIVE BODY BUT ABOVE THE TEMPERATURE AT WHICH SAID SILOXANE COMPOUND DECOMPOSES TO DEPOSIT ON THE SURFACE OF SAID BODY A COATING CONSISTING OF SILICON OXIDE CONTAINING SAID CONDUCTIVITY MODIFIER; AND, HEATING SAID COATED SEMICONDUCTIVE BODY TO DIFFUSE SAID MODIFIER FROM SAID COATING INTO THAT PORTION ONLY OF SAID BODY IMMEDIATELY BENEATH SAID COATING.

References Cited (Backward Citations)

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US2762115A Cited
US2921362A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1968-08-09 1969-02-08 1969-08-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1972-08-09 1973-02-08 1973-08-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1976-08-09 1977-02-08 1977-08-10 $7700.00 Window Closed / Lapsed

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