US3361600A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of doping epitaxially grown semiconductor material
Assignee: International Business Machines Corp
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Filing: 1965-08-09
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Granted: 1968-01-02
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Expires: 1985-08-09
Abstract
No abstract record available.
Inventors
- 👤 Reisman Arnold
- 👤 Berkenblit Melvin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:48
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/08; H10P14/24; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/925
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
81 words
A METHOD FOR DOPING EPTIAXIALLY GROWN SEMICONDUCTOR MATERIAL IN A PERTURABLE DISPROPORTIONATION SYSTEM COMPRISING THE STEPS OF REACTING GERMANIUM WITH A HYDROGEN, INERT GAS, HALIDE MIXTURE TO PRODUCE A MIXTURE OF COMPOUNDS OF SAID ELEMENTS IN THE VAPOR PHASE AND SIMULTANEOUSLY ADDING A GASEOUS HYDRIDE DOPANT AND A PERTURBING GAS TO SAID MIXTURE TO PYROLYTICALLY DECOMPOSE SAID GASEOUS HYDRIDE AND TO PERTURB THE EQUILIBRIUM VAPOR PHASE CONTENT OF GERMANIUM IN SAID MIXTURE WHEREBY DOPED GERMANIUM IS EPITAXIALLY DEPOSITED ON A SUBSTRATE.
Claim 2
Independent Claim
81 words
A METHOD FOR DOPING EPTIAXIALLY GROWN SEMICONDUCTOR MATERIAL IN A PERTURABLE DISPROPORTIONATION SYSTEM COMPRISING THE STEPS OF REACTING GERMANIUM WITH A HYDROGEN, INERT GAS, HALIDE MIXTURE TO PRODUCE A MIXTURE OF COMPOUNDS OF SAID ELEMENTS IN THE VAPOR PHASE AND SIMULTANEOUSLY ADDING A GASEOUS HYDRIDE DOPANT AND A PERTURBING GAS TO SAID MIXTURE TO PYROLYTICALLY DECOMPOSE SAID GASEOUS HYDRIDE AND TO PERTURB THE EQUILIBRIUM VAPOR PHASE CONTENT OF GERMANIUM IN SAID MIXTURE WHEREBY DOPED GERMANIUM IS EPITAXIALLY DEPOSITED ON A SUBSTRATE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-01-01 | 1971-07-03 | 1972-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-01-01 | 1975-07-03 | 1976-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-01-01 | 1979-07-03 | 1980-01-02 | $7700.00 | Window Closed / Lapsed |