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Patent US3360408A successfully refreshed from Google Patents.
US3360408A
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US
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Method of producing semiconductor material using a phosphorus nitrile halide
Assignee: Siemens Schuckertwerke AG
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Filing: 1965-01-29
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Granted: 1967-12-26
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Expires: 1985-01-29
Abstract
No abstract record available.
Inventors
- 👤 Wartenberg Klaus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:41
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/035; C30B25/00; C30B25/02; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S252/00; Y10S252/95; Y10S252/951
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
64 words
IN THE METHOD OF PRODUCING SEMICONDUCTOR MATERIAL BY PYROLYTIC PRECIPITATION OF SEMICONDUCTOR MATERIAL, UPON A MONOCRYSTALLINE HEATED CARRIER BODY OF THE SAME SEMICONDUCTOR MATERIAL, FROM A GASEOUS REACTION MIXTURE OF A COMPOUND OF THE SEMICONDUCTOR MATERIAL AND HYDROGEN, THE IMPROVEMENT WHICH COMPRISES PASSING A PORTION OF THE GASEOUS REACTION MIXTURE OVER PHOSPHONITRILE HALIDE, PRIOR TO INTRODUCING THE GASEOUS REACTION MIXTURE TO THE REACTION CHAMBER.
Claim 2
Dependent Claim
64 words
IN THE METHOD OF PRODUCING SEMICONDUCTOR MATERIAL BY PYROLYTIC PRECIPITATION OF SEMICONDUCTOR MATERIAL, UPON A MONOCRYSTALLINE HEATED CARRIER BODY OF THE SAME SEMICONDUCTOR MATERIAL, FROM A GASEOUS REACTION MIXTURE OF A COMPOUND OF THE SEMICONDUCTOR MATERIAL AND HYDROGEN, THE IMPROVEMENT WHICH COMPRISES PASSING A PORTION OF THE GASEOUS REACTION MIXTURE OVER PHOSPHONITRILE HALIDE, PRIOR TO INTRODUCING THE GASEOUS REACTION MIXTURE TO THE REACTION CHAMBER.
References Cited (Backward Citations)
US3168422A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-12-25 | 1971-06-26 | 1971-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-12-25 | 1975-06-26 | 1975-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-12-25 | 1979-06-26 | 1979-12-26 | $7700.00 | Window Closed / Lapsed |