Patent US3348987A successfully refreshed from Google Patents.
US3348987A
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Method of producing thin layers of galvanomagnetic semiconductor material, particularly hall generators of aiiibv compounds
Assignee: Siemens Schuckertwerke AG
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Filing: 1964-07-17
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Granted: 1967-10-24
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Expires: 1984-07-17
Abstract
No abstract record available.
Inventors
- 👤 Stark Gustav
- 👤 Otto Klaus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:30
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/30; C23F3/00; C23F3/04; C23F3/06; H; H10; H10N; H10N52/00; H10N52/80; H10N52/85; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
69 words
THE METHOD OF PRODUCING THIN LAYERS OF INDIUM ANTIMONIDE AND INDIUM ARSENIDE, WHICH COMPRISES PREGRINDING THE LAYERS ON SUBSTRATES TO A GIVEN THICKNESS, AND SUBJECTING THE LAYERS ON THE SUBSTRATES TO SIMULTANEOUS ETCHING AND CHEMICAL POLISHING IN AN AQUEOUS FERRIC CHLORIDE SOLUTION CONTAINING AN ADDITION OF GLYCERIN IN A VOLUMETRIC RATIO OF AT LEAST ONE PART GLYCERIN TO FIVE PARTS SOLUTION, AND THEREBY REDUCING THE LAYER TO ULTIMATE THICKNESS.
Claim 2
Independent Claim
69 words
THE METHOD OF PRODUCING THIN LAYERS OF INDIUM ANTIMONIDE AND INDIUM ARSENIDE, WHICH COMPRISES PREGRINDING THE LAYERS ON SUBSTRATES TO A GIVEN THICKNESS, AND SUBJECTING THE LAYERS ON THE SUBSTRATES TO SIMULTANEOUS ETCHING AND CHEMICAL POLISHING IN AN AQUEOUS FERRIC CHLORIDE SOLUTION CONTAINING AN ADDITION OF GLYCERIN IN A VOLUMETRIC RATIO OF AT LEAST ONE PART GLYCERIN TO FIVE PARTS SOLUTION, AND THEREBY REDUCING THE LAYER TO ULTIMATE THICKNESS.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-10-23 | 1971-04-24 | 1971-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-10-23 | 1975-04-24 | 1975-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-10-23 | 1979-04-24 | 1979-10-24 | $7700.00 | Window Closed / Lapsed |