Method and apparatus for cathode sputtering including suppressing temperature rise adjacent the anode using a localized magnetic field

Claim 2

APPARATUS FOR COATING AN ARTICLE COMPRISING: A CHAMBER CAPABLE OF HOLDING A HIGH VACUUM; MEANS FOR EVACUATING SAID CHAMBER; MEANS FOR PROVIDING GAS TO SAID CHAMBER; A CATHODE AND AN ANODE WITHIN SAID CHAMBER; MEANS FOR POSITIONING SAID ARTICLE BETWEEN SAID CATHODE AND ANODE AND ADJACENT TO SAID ANODE; MEANS FOR IMPRESSING A VOLTAGE ACROSS SAID CATHODE AND ANODE WHICH ACTS TO ESTABLISH AN ELECTRIC FIELD BETWEEN SAID CATHODE AND ANODE, AND TO CATHODIC SPUTTER PARTICLES FROM THE CATHODE; MEANS FOR GENERATING A LOCALIZED MAGNETIC FIELD DIRECTLY OVER SUBSTANTIALLY THE ENTIRE SURFACE OF SAID ARTICLE AND AT SUBSTANTIALLY RIGHT ANGLES TO THE SAID ELECTRIC FIELD WHEREBY CHARGED PARTICLES ARE DEFLECTED AWAY FROM THE SURFACE OF SAID ARTICLE AND THE TEMPERATURE OF SAID ARTICLE IS MAINTAINED AT A REALTIVELY LOW VALUE; AND MEANS FOR ADJUSTING THE POSITIONAL RELATIONSHIP BETWEEN THE SAID MEANS FOR GENERATING A MAGNETIC FIELD AND SAID ARTICLE TO THEREBY VARY THE COOLING EFFECT OF THE MAGNETIC FIELD ON THE SAID ARTICLE.

Claim 3

APPARATUS FOR COATING AN ARTICLE COMPRISING: A CHAMBER CAPABLE OF HOLDING A HIGH VACUUM: MEANS FOR EVACUATING SAID CHAMBER; MEANS FOR PROVIDING GAS TO SAID CHAMBER; A CATHODE AND AN ANODE WITHIN SAID CHAMBER; MEANS FOR POSITIONING SAID ARTICLE BETWEEN SAID CATHODE AND ANODE AND ADJACENT TO SAID ANODE; MEANS FOR IMPRESSING A VOLTAGE ACROSS SAID CATHODE AND ANODE WHICH ACTS TO ESTABLISH AN ELECTRIC FIELD BETWEEN SAID CATHODE AND ANODE, AND TO CATHODIC SPUTTER PARTICLES FROM THE CATHODE; A HORSESHOE MAGNET POSITIONED SO THAT THE SAID ARTICLE IS IN THE MAGNET''S EXTERNAL MAGNETIC FIELD BETWEEN ITS POLE PIECES WHEREBY CHARGED PARTICLES ARE DEFLECTED AWAY FROM THE SURFACE OF SAID ARTICLE AND THE TEMPERATURE OF SAID ARTICLE BEING THEREBY MAINTAINED AT A RELATIVELY LOW VALUE; A COOLING COIL SURROUNDING SAID HORSESHOE MAGNET HAVING COOLING FLUID THEREIN TO MAINTAIN THE SAID MAGNET AT A TEMPERATURE LOW ENOUGH TAHT ITS MAGNETIC FIELD STRENGTH REMAINS SUBSTANTIALLY CONSTANT DURING THE COATING PERIOD; A RACK AND PINION; SAID RACK BEING MOVED BY THE ROTATION OF SAID PINION; SAID ARTICLE BEING MOUNTED ON THE END OF SAID RACK; MEANS FOR TURNING SAID PINION TO ADJUST THE POSITION OF THE SAID ARTICLE IN RELATION TO THE SAID POLE PIECES OF SAID MAGNET TO VARY THE COOLING EFFECT OF THE SAID MAGNETIC FIELD ON THE SAID ARTICLE.

Claim 4

APPARATUS FOR COATING AN ARTICLE COMPRISING: A CHAMBER CAPABLE OF HOLDING A HIGH VACUUM: MEANS FOR EVACUATING SAID CHAMBER; MEANS FOR PROVIDING GAS TO SAID CHAMBER; A CATHODE AND AN ANODE WITHIN SAID CHAMBER; MEANS FOR POSITIONING SAID ARTICLE BETWEEN SAID CATHODE AND ANODE AND ADJACENT TO SAID ANODE; MEANS FOR IMPRESSING A VOLTAGE ACROSS SAID CATHODE AND ANODE WHICH ACTS TO ESTABLISH AN ELECTRIC FIELD BETWEEN SAID CATHODE AND ANODE, AND TO CATHODIC SPUTTER PARTICLES FROM THE CATHODE; A HORSESHOE MAGNET POSITIONED SO THAT THE SAID ARTICLE IS IN THE MAGNET''S EXTERNAL MAGNETIC FIELD BETWEEN ITS POLE PIECES WHEREBY CHARGED PARTICLES ARE DEFLECTED AWAY FROM THE SURFACE OF SAID ARTICLE AND THE TEMPERATURE OF SAID ARTICLE BEING THEREBY MAINTAINED AT A RELATIVELY LOW VALUE; A COOLING COIL SURROUNDING SAID HORSESHOE MAGNET HAVING COOLING FLUID THEREIN TO MAINTAIN THE SAID MAGNET AT A TEMPERATURE LOW ENOUGH TAHT ITS MAGNETIC FIELD STRENGTH REMAINS SUBSTANTIALLY CONSTANT DURING THE COATING PERIOD; A RACK AND PINION; SAID RACK BEING MOVED BY THE ROTATION OF SAID PINION; SAID ARTICLE BEING MOUNTED ON THE END OF SAID RACK; MEANS FOR TURNING SAID PINION TO ADJUST THE POSITION OF THE SAID ARTICLE IN RELATION TO THE SAID POLE PIECES OF SAID MAGNET TO VARY THE COOLING EFFECT OF THE SAID MAGNETIC FIELD ON THE SAID ARTICLE.