Patent US3328141A successfully refreshed from Google Patents.
US3328141A
Expired / Lapsed
US
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Process for polishing crystalline silicon
Assignee: Tizon Chemical Corp
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Filing: 1966-02-28
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Granted: 1967-06-27
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Expires: 1986-02-28
Abstract
No abstract record available.
Inventors
- 👤 Raymond L Lachapelle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:00
CPC Classifications
C; C09; C09K; C09K3/00; C09K3/14
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
94 words
A PROCESS FOR POLISHING CRYSTALLINE SILICON, WHICH COMPRISES APPLYING TO THE SURFACE OF THE SILICON A COMPOSITION CONSISTING ESSENTIALLY OF A POLISHING COMPOUND FOR SILIC HAVING A PARTICLE SIZE OF NOT MORE THAN ABOUT 20 MICRONS, WATER IN AN AMOUNT TO FORM A POLISHING SLURRY, AND AN INORGANIC ALKALINE COMPOUND IN AN AMOUNT WITHIN THE RANGE FROM ABOUT 0.05 TO ABOUT 1000% BY WEIGHT OF THE POLISHING COMPOUND TO BRING THE PH TO AT LEAST ABOUT 10 AND INCREASE THE POLISHING EFFECTIVENESS OF THE POLISHING COMPOUND; AND POLISHING THE SILICON SURFACE WITH THE COMPOSITION.
Claim 2
Dependent Claim
94 words
A PROCESS FOR POLISHING CRYSTALLINE SILICON, WHICH COMPRISES APPLYING TO THE SURFACE OF THE SILICON A COMPOSITION CONSISTING ESSENTIALLY OF A POLISHING COMPOUND FOR SILIC HAVING A PARTICLE SIZE OF NOT MORE THAN ABOUT 20 MICRONS, WATER IN AN AMOUNT TO FORM A POLISHING SLURRY, AND AN INORGANIC ALKALINE COMPOUND IN AN AMOUNT WITHIN THE RANGE FROM ABOUT 0.05 TO ABOUT 1000% BY WEIGHT OF THE POLISHING COMPOUND TO BRING THE PH TO AT LEAST ABOUT 10 AND INCREASE THE POLISHING EFFECTIVENESS OF THE POLISHING COMPOUND; AND POLISHING THE SILICON SURFACE WITH THE COMPOSITION.
Claim 3
Dependent Claim
17 words
A PROCESS IN ACCORDANCE WITH CLAIM 1 IN WHICH THE ALKALINE COMPOUND IS AN LAKALI METAL HYDROXIDE.
References Cited (Backward Citations)
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Cited
US2193965A
Cited
US2383500A
Cited
US3060098A
Cited
US3097083A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-06-26 | 1970-12-26 | 1971-06-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-06-26 | 1974-12-26 | 1975-06-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-06-26 | 1978-12-26 | 1979-06-27 | $7700.00 | Window Closed / Lapsed |