US3294661A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process of coating, using a liquid metal substrate holder
Assignee: International Business Machines Corp
•
Filing: 1966-04-06
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Granted: 1966-12-27
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Expires: 1986-04-06
Abstract
No abstract record available.
Inventors
- 👤 Leon I Maissel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; H; H10; H10W; H10W74/00; H10W74/40
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
130 words
A METHOD FOR FABRICATING MICROMINATURIZED CIRCUIT ELEMENTS WHICH COMPRISES THE STEPS OF PLACING A SUBSTRATE ON A LIQUID METAL FILM ON A HOLDER IN A CHAMBER, THE LIQUID METAL HAVING A VAPOR PRESSURE IN THE RANGE FROM O TO ABOUT 10-9 TORR AND A MELTING TEMPERATURE FROM ROOM TEMPERATURE TO ABOUT 650*C. PROVIDING A LOW PRESSURE ATMOSPHERE WITHIN THE CHAMBER, PROVIDING IN THE CHAMBER A FIRST ELECTRODE HAVING A MATERIAL SUITABLE FOR DEPOSITION ON THE SUBSTRATE PROVIDING A SECOND ELECTRODE WITHIN SAID CHAMBER, AND PROVIDING HEAT EXCHANGING MEANS TO EXCHANGE HEAT UNIFORMLY FROM SAID LIQUID METAL WHEREBY THE HORIZONTAL TEMPERATURE GRADIENT ACROSS SAID CIRCUIT ELEMENT IS SUBSTANTIALLY ZERO, APPLYING AN ELECTRIC POTENTIAL BETWEEN THE FIRST AND SECOND ELECTRODES TO SPUTTER THE MATERIALS AND FORM A THIN FILO ON THE SUBSTRATE.
Claim 2
Independent Claim
130 words
A METHOD FOR FABRICATING MICROMINATURIZED CIRCUIT ELEMENTS WHICH COMPRISES THE STEPS OF PLACING A SUBSTRATE ON A LIQUID METAL FILM ON A HOLDER IN A CHAMBER, THE LIQUID METAL HAVING A VAPOR PRESSURE IN THE RANGE FROM O TO ABOUT 10-9 TORR AND A MELTING TEMPERATURE FROM ROOM TEMPERATURE TO ABOUT 650*C. PROVIDING A LOW PRESSURE ATMOSPHERE WITHIN THE CHAMBER, PROVIDING IN THE CHAMBER A FIRST ELECTRODE HAVING A MATERIAL SUITABLE FOR DEPOSITION ON THE SUBSTRATE PROVIDING A SECOND ELECTRODE WITHIN SAID CHAMBER, AND PROVIDING HEAT EXCHANGING MEANS TO EXCHANGE HEAT UNIFORMLY FROM SAID LIQUID METAL WHEREBY THE HORIZONTAL TEMPERATURE GRADIENT ACROSS SAID CIRCUIT ELEMENT IS SUBSTANTIALLY ZERO, APPLYING AN ELECTRIC POTENTIAL BETWEEN THE FIRST AND SECOND ELECTRODES TO SPUTTER THE MATERIALS AND FORM A THIN FILO ON THE SUBSTRATE.
References Cited (Backward Citations)
US2522531A
Cited
US3235476A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-26 | 1970-06-27 | 1970-12-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-26 | 1974-06-27 | 1974-12-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-26 | 1978-06-27 | 1978-12-27 | $7700.00 | Window Closed / Lapsed |