US3235476A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of producing ohmic contacts on semiconductors
Assignee: Motors Liquidation Co
•
Filing: 1963-02-21
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Granted: 1966-02-15
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Expires: 1983-02-21
Abstract
No abstract record available.
Inventors
- 👤 David R Boyd
- 👤 Yro T Sihvonen
- 👤 Calvin D Woelke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:23
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/138; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; H10P; H10P95/00; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
131 words
A METHOD FOR THE PRODUCTION OF THIN FILMS WHICH COMPRISES THE FOLLOWING STEPS: PLACING A SUBSTRATE IN A CLOSED CHAMBER, PROVIDING A LOW PRESSURE OXYGEN ATMOSPHERE WITHIN SAID CHAMBER, PROVIDING IN SAID CHAMBER A FIRST ELECTRODE HAVING AN ACTIVE SURFACE THEREON WHICH IS FORMED OF A TIN-INDIUM ALLOY CONTAINING ABOUT 10% TO 70%, BY WEIGHT, TIN AND THE BALANCE SUBSTANTIALLY INDIUM, PROVIDING A SECOND ELECTRODE WITHIN SAID CHAMBER, APPLYING A NEGATIVE POTENTIAL TO SAID SECOND ELECTRODE SO AS TO CLEAN SAID SUBSTRATE BY REVERSE SPUTTERING, AND APPLYING A NEGATIVE POTENTIAL TO SAID FIRST ELECTRODE, SAID POTENTIAL ON SAID FIRST ELECTRODE BEING SUFFICIENT IN DEGREE AND DURATION AT SAID PRESSURE TO SPUTTER SAID TININDIUM ALLOY INTO SAID OXYGEN ATMOSPHERE CAUSING A DEPOSITION OF A TRANSPARENT ELECTRICALLY CONDUCTIVE FILM ON SAID SUBSTRATE MATERIAL.
Claim 2
Independent Claim
131 words
A METHOD FOR THE PRODUCTION OF THIN FILMS WHICH COMPRISES THE FOLLOWING STEPS: PLACING A SUBSTRATE IN A CLOSED CHAMBER, PROVIDING A LOW PRESSURE OXYGEN ATMOSPHERE WITHIN SAID CHAMBER, PROVIDING IN SAID CHAMBER A FIRST ELECTRODE HAVING AN ACTIVE SURFACE THEREON WHICH IS FORMED OF A TIN-INDIUM ALLOY CONTAINING ABOUT 10% TO 70%, BY WEIGHT, TIN AND THE BALANCE SUBSTANTIALLY INDIUM, PROVIDING A SECOND ELECTRODE WITHIN SAID CHAMBER, APPLYING A NEGATIVE POTENTIAL TO SAID SECOND ELECTRODE SO AS TO CLEAN SAID SUBSTRATE BY REVERSE SPUTTERING, AND APPLYING A NEGATIVE POTENTIAL TO SAID FIRST ELECTRODE, SAID POTENTIAL ON SAID FIRST ELECTRODE BEING SUFFICIENT IN DEGREE AND DURATION AT SAID PRESSURE TO SPUTTER SAID TININDIUM ALLOY INTO SAID OXYGEN ATMOSPHERE CAUSING A DEPOSITION OF A TRANSPARENT ELECTRICALLY CONDUCTIVE FILM ON SAID SUBSTRATE MATERIAL.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-02-14 | 1969-08-16 | 1970-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-02-14 | 1973-08-16 | 1974-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-02-14 | 1977-08-16 | 1978-02-15 | $7700.00 | Window Closed / Lapsed |