Patent US3294261A successfully refreshed from Google Patents.
← Back to Patent Explorer
US3294261A Expired / Lapsed US ⏱️ 0.0 years remaining

Continuous drive feed for oxidationdiffusion furnace

Assignee: Individual
•
Filing: 1965-06-30
•
Granted: 1966-12-27
•
Expires: 1985-06-30
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

No abstract record available.

Inventors

  • 👤 Jr Joseph A Cloutier

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 20:02
CPC Classifications
F; F27; F27D; F27D3/00; F27D3/0084; F27D2003/0034; F27D2003/0067

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 30 words
IN COMBINATION WITH A CONTINUOUS OXIDATION-DIFFUSION FURNACE, WITH A CHANNEL THEREIN FOR RECEIVING QUARTZ CARRIERS FOR SEMICONDUCTOR WAFERS, WHEREBY THE SEMICONDUCTOR WAFERS MAY BE PROCESSED IN SAID FURNACE; A CONTINUOUS
Claim 2
Dependent Claim 30 words
IN COMBINATION WITH A CONTINUOUS OXIDATION-DIFFUSION FURNACE, WITH A CHANNEL THEREIN FOR RECEIVING QUARTZ CARRIERS FOR SEMICONDUCTOR WAFERS, WHEREBY THE SEMICONDUCTOR WAFERS MAY BE PROCESSED IN SAID FURNACE; A CONTINUOUS

References Cited (Backward Citations)

US3202406A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1969-12-26 1970-06-27 1970-12-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1973-12-26 1974-06-27 1974-12-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1977-12-26 1978-06-27 1978-12-27 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag