US3293162A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for electropolishing both sides of a semiconductor simultaneously
Assignee: AT&T Inc
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Filing: 1964-06-30
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Granted: 1966-12-20
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Expires: 1984-06-30
Abstract
No abstract record available.
Inventors
- 👤 Miles V Sullivan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:31
CPC Classifications
H; H10; H10P; H10P52/00; H10P52/40; H10P52/402; C; C25; C25F; C25F3/00; C25F3/16; C25F3/30; C25F7/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
79 words
A PROCESS FOR THE ELECTROPOLISHING OF A SEMICONDUCTOR WAFER WHICH COMPRISES THE STEPS OF SUSPENDING A SEMICONDUCTOR WAFER IN AN ELECTRLYTE BETWEEN TWO CLOSELY SPACED FLAT ELECTRODES HAVING PARALLEL JUXTAPOSED WORKING FACES AND HAVING A CLOTH FIXED THEREON, SAID CLOTH HAVING A PILE LESS THAN ABOUT 0.020 INCH, APPLYING AN ALTERNATING CURRENT ACROSS SAID ELECTRODES AND ROTATING THE SAID WAFER ALONG A PLANE SUBSTANTIALLY PARALLEL TO SAID ELECTRODES, THEREBY PERMITTING THE SIMULTANEOUS POLISHING OF BOTH FACES OF SAID WATER.
Claim 2
Dependent Claim
79 words
A PROCESS FOR THE ELECTROPOLISHING OF A SEMICONDUCTOR WAFER WHICH COMPRISES THE STEPS OF SUSPENDING A SEMICONDUCTOR WAFER IN AN ELECTRLYTE BETWEEN TWO CLOSELY SPACED FLAT ELECTRODES HAVING PARALLEL JUXTAPOSED WORKING FACES AND HAVING A CLOTH FIXED THEREON, SAID CLOTH HAVING A PILE LESS THAN ABOUT 0.020 INCH, APPLYING AN ALTERNATING CURRENT ACROSS SAID ELECTRODES AND ROTATING THE SAID WAFER ALONG A PLANE SUBSTANTIALLY PARALLEL TO SAID ELECTRODES, THEREBY PERMITTING THE SIMULTANEOUS POLISHING OF BOTH FACES OF SAID WATER.
References Cited (Backward Citations)
CA576351A
Cited
US2294227A
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US2539455A
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US2590927A
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US2939825A
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US2983655A
Cited
US2965556A
Cited
US3073764A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-19 | 1970-06-20 | 1970-12-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-19 | 1974-06-20 | 1974-12-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-19 | 1978-06-20 | 1978-12-20 | $7700.00 | Window Closed / Lapsed |