US3290760A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making a composite insulator semiconductor wafer
Assignee: RCA Corp
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Filing: 1963-12-16
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Granted: 1966-12-13
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Expires: 1983-12-16
Abstract
No abstract record available.
Inventors
- 👤 Eric F Cave
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 20:12
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/01; H10D86/00; H10D86/01; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10P95/00; H10W; H10W74/00; H10W74/40; H10W74/43; Y; Y10; Y10S; Y10S148/00; Y10S148/012; Y10S148/085; Y10S257/00; Y10S257/926; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
137 words
A METHOD OF MAKING A COMPOSITE INSULATOR-SEMICONDUCTOR WAFER COMPRISING THE STEPS OF (A) FORMING AN OXIDE ON A PLURALITY OF SHEETS OF SIMICONDUCTOR MATERIAL, (B) SUPERIMPOSING SAID OXIDIZED SHEETS OVER EACH OTHER TO FORM A FIRST STACK, (C) APPLYING PRESSURE ACROSS SAID FIRST STACK, (D) HEATING SAID PRESSURIZED FIRST STACK UNTIL SAID OXIDE ON ADJACENT SHEETS FUSES, (E) CUTTING SAID FIRST STACK INTO SLICES, EACH SLICE BEING CUT AT AN ANGLE TO THE LARGE SURFACES OF SAID SHEETS, (F) FORMING AN OXIDE ON SAID SLICES, (G) SUPERIMPOSING SAID OXIDIZED SLICES OVER EACH OTHER TO FORM A SECOND STACK, (H) HEATING SAID SECOND STACK WHILE APPLYING PRESSURE ACROSS SAID SECOND STACK TO FUSE SAID OXIDE ON ADJACENT ONES OF SAID SLICES, AND (I) SLICING SAID SECOND STACK AT AN ANGLE TO SAID SLICES TO FORM SAID COMPOSITE WAFER.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-12-12 | 1970-06-13 | 1970-12-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-12-12 | 1974-06-13 | 1974-12-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-12-12 | 1978-06-13 | 1978-12-13 | $7700.00 | Window Closed / Lapsed |