US3286685A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process and apparatus for pyrolytic production of pure semiconductor material, preferably silicon
Assignee: Siemens Schuckertwerke AG
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Filing: 1962-01-25
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Granted: 1966-11-22
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Expires: 1982-01-25
Abstract
No abstract record available.
Inventors
- 👤 Sandmann Herbert
- 👤 Rucha Ulrich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:04
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/035; C22; C22B; C22B41/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
133 words
APPARATUS FOR PRODUCING PURE SEMICONDUCTOR MATERIAL BY THERMAL DISSOCIATION AND PRECIPITATION OF THE MATERIAL FROM A GASEOUS SUBSTANCE THAT CONTAINS THE MATERIAL AS A COMPONENT, ONTO PRECIPITATION CARRIER STRUCTURE ELECTRICALLY HEATED BY BEING TRAVERSED BY ELECTRIC CURRENT, COMPRISING A PROCESSING VESSEL HAVING A BASE OF METAL WITH A GROUND PLANAR TOP SURFACE AND A BELL-SHAPED RECIPIENT GAS-TIGHTLY SEALED ON SAID TOP SURFACE TO PROVIDE AN ENCLOSED PROCESSING CHAMBER, SAID BASE HAVING DUCT MEANS FOR SUPPLY AND DISCHARGE OF PROCESSING GAS TO AND FROM SAID CHAMBER, ELECTRICALLY CONDUCTIVE HOLDER MEANS MOUNTED ON SAID BASE IN SAID CHAMBER FOR HOLDING AND ELECTRICALLY ENERGIZING SAID PRECIPITATION CARRIER STRUCTURE, SAID RECIPIENT CONSISTING OF MATERIAL DIFFERENT FROM THAT OF SAID BASE, AND AN INSERT PLATE REMOVABLY SEATED ON SAID TOP SURFACE OF SAID BASE IN FACE-TO-FACE CONTACT THEREWITH
Claim 2
Dependent Claim
133 words
APPARATUS FOR PRODUCING PURE SEMICONDUCTOR MATERIAL BY THERMAL DISSOCIATION AND PRECIPITATION OF THE MATERIAL FROM A GASEOUS SUBSTANCE THAT CONTAINS THE MATERIAL AS A COMPONENT, ONTO PRECIPITATION CARRIER STRUCTURE ELECTRICALLY HEATED BY BEING TRAVERSED BY ELECTRIC CURRENT, COMPRISING A PROCESSING VESSEL HAVING A BASE OF METAL WITH A GROUND PLANAR TOP SURFACE AND A BELL-SHAPED RECIPIENT GAS-TIGHTLY SEALED ON SAID TOP SURFACE TO PROVIDE AN ENCLOSED PROCESSING CHAMBER, SAID BASE HAVING DUCT MEANS FOR SUPPLY AND DISCHARGE OF PROCESSING GAS TO AND FROM SAID CHAMBER, ELECTRICALLY CONDUCTIVE HOLDER MEANS MOUNTED ON SAID BASE IN SAID CHAMBER FOR HOLDING AND ELECTRICALLY ENERGIZING SAID PRECIPITATION CARRIER STRUCTURE, SAID RECIPIENT CONSISTING OF MATERIAL DIFFERENT FROM THAT OF SAID BASE, AND AN INSERT PLATE REMOVABLY SEATED ON SAID TOP SURFACE OF SAID BASE IN FACE-TO-FACE CONTACT THEREWITH
References Cited (Backward Citations)
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Cited
US3021198A
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US2967115A
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US3134695A
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US2999735A
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US3053638A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-11-21 | 1970-05-23 | 1970-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-11-21 | 1974-05-23 | 1974-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-11-21 | 1978-05-23 | 1978-11-22 | $7700.00 | Window Closed / Lapsed |