Patent US2833398A successfully refreshed from Google Patents.
US2967115A
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Method of depositing silicon on a silica coated substrate
Assignee: General Electric Co
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Filing: 1958-07-25
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Granted: 1961-01-03
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Expires: 1978-07-25
Abstract
No abstract record available.
Inventors
- 👤 Carlyle S Herrick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 12:21
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; B; B01; B01J; B01J19/00; B01J19/02; C01; C01B; C01B33/00; C01B33/02; C23C16/01; C23C16/02; C23C16/0272; C23C16/24; B01J2219/00; B01J2219/02; B01J2219/0204; B01J2219/025; Y; Y10; Y10S; Y10S65/00; Y10S65/08
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
62 words
IN THE DECOMPOSITION OF SILICON FROM SILICON COMPOUNDS UPON A SURFACE ELEMENT, THE IMPROVEMENT WHICH COMPRISES COATING THE SURFACE ELEMENT WITH AN IMPURITY DIFFUSION BARRIER-RELEASE AGENT FILM, SAID COATING INCLUDING VAPORIZING A SILICON HALIDE, HEATING SAID HALIDE VAPOR FOR DECOMPOSITION THEREOF TO FORM A FINELY DIVIDED AMORPHOUS LAYER OF SILICA ON A SURFACE ELEMENT, AND THEREAFTER DEPOSITING ELEMENTAL SILICON ON SAID LAYER.
Claim 2
Dependent Claim
62 words
IN THE DECOMPOSITION OF SILICON FROM SILICON COMPOUNDS UPON A SURFACE ELEMENT, THE IMPROVEMENT WHICH COMPRISES COATING THE SURFACE ELEMENT WITH AN IMPURITY DIFFUSION BARRIER-RELEASE AGENT FILM, SAID COATING INCLUDING VAPORIZING A SILICON HALIDE, HEATING SAID HALIDE VAPOR FOR DECOMPOSITION THEREOF TO FORM A FINELY DIVIDED AMORPHOUS LAYER OF SILICA ON A SURFACE ELEMENT, AND THEREAFTER DEPOSITING ELEMENTAL SILICON ON SAID LAYER.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1964-01-03 | 1964-07-04 | 1965-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1968-01-03 | 1968-07-04 | 1969-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1972-01-03 | 1972-07-04 | 1973-01-03 | $7700.00 | Window Closed / Lapsed |