US3267014A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for rapidly etching a flatbottomed pit in a germanium wafer
Assignee: Lanteris Space LLC
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Filing: 1963-07-11
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Granted: 1966-08-16
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Expires: 1983-07-11
Abstract
No abstract record available.
Inventors
- 👤 Donald P Sanders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 19:08
CPC Classifications
C; C25; C25F; C25F3/00; C25F3/02; C25F3/12; H; H10; H10P; H10P50/00; H10P50/60; H10P50/61; H10P50/613
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
110 words
A PROCESS FOR RAPIDLY ETCHING A FLAT-BOTTOMED PIT IN THE FACE OF A GERMANIUM WAFER COMPRISING: DIRECTING AGAINST SAID WAFER FROM A NOZZLE SPACED THEREFROM A JET OF AN ELECTROLYTE SOLUTION CONSISTING ESSENTIALLY OF ABOUT 1730 TO 1762 PARTS H2O, ABOUT 9 TO 52 PARTS H2SO4, AND ABOUT 46 TO 57 PARTS HF, APPLYING AN ETCHING VOLTAGE ACROSS SAID SOLUTION AND SAID WAFER SUFFICIENT TO CREATE A CURRENT DENSITY OF AT LEAST ABOUT 5X10-4 AMPERES PER SQUARE INCH IN SAID JET, ILLUMINATING THE FACE OF SAID WAFER BEING ETCHED, AND SPACING SAID NOZZLE FROM SAID WAFER A DISTANCE INTERMEDIATE THE RESPECTIVE DISTANCES WHICH WILL PROVIDE BOWL-BOTTOMED AND MOUND-BOTTOMED ETCH PITS.
Claim 2
Dependent Claim
110 words
A PROCESS FOR RAPIDLY ETCHING A FLAT-BOTTOMED PIT IN THE FACE OF A GERMANIUM WAFER COMPRISING: DIRECTING AGAINST SAID WAFER FROM A NOZZLE SPACED THEREFROM A JET OF AN ELECTROLYTE SOLUTION CONSISTING ESSENTIALLY OF ABOUT 1730 TO 1762 PARTS H2O, ABOUT 9 TO 52 PARTS H2SO4, AND ABOUT 46 TO 57 PARTS HF, APPLYING AN ETCHING VOLTAGE ACROSS SAID SOLUTION AND SAID WAFER SUFFICIENT TO CREATE A CURRENT DENSITY OF AT LEAST ABOUT 5X10-4 AMPERES PER SQUARE INCH IN SAID JET, ILLUMINATING THE FACE OF SAID WAFER BEING ETCHED, AND SPACING SAID NOZZLE FROM SAID WAFER A DISTANCE INTERMEDIATE THE RESPECTIVE DISTANCES WHICH WILL PROVIDE BOWL-BOTTOMED AND MOUND-BOTTOMED ETCH PITS.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-08-15 | 1970-02-14 | 1970-08-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-08-15 | 1974-02-14 | 1974-08-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-08-15 | 1978-02-14 | 1978-08-16 | $7700.00 | Window Closed / Lapsed |