US3244567A
Expired / Lapsed
US
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Impurity diffusion method
Assignee: TRW Semiconductors Inc
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Filing: 1962-09-10
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Granted: 1966-04-05
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Expires: 1982-09-10
Abstract
No abstract record available.
Inventors
- 👤 Joan M Crishal
- 👤 Chapelle Theodore J La
- 👤 William R Wilcox
- 👤 James P Sandstrom
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 04:05
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S252/00; Y10S252/95; Y10S252/951
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
81 words
THE METHOD OF DIFFUSING PHOSPHORUS ATOMS INTO THE SURFACE OF A BODY OF SEMICONDUCTOR MATERIAL, COMPRISING THE STEPS OF: MAINTAINING THE SEMICONDUCTOR BODY WITHIN A FURNACE HEATED TO A PREDETERMINED TEMPERATURE; MAINTAINING ELEMENTAL PHOSPHORUS WITHIN SAID FURNACE IN A PREDETERMINED OXYGEN BEARING ATMOSPHERE TO THEREBY GENERATE ANHYDROUS PHOSPHORUS PENTOXIDE VAPORS WITHIN SAID FURNACE; AND TRANSPORTING THE PHOSPHORUS PENTOXIDE VAPORS GENERATED WITHIN SAID FURNACE PAST SAID SEMICONDUCTOR BODY TO THEREBY CAUSE DIFFUSION OF PHOSPHORUS ATOMS INTO THE SURFACE OF SAID SEMICONDUCTOR BODY.
Claim 2
Independent Claim
81 words
THE METHOD OF DIFFUSING PHOSPHORUS ATOMS INTO THE SURFACE OF A BODY OF SEMICONDUCTOR MATERIAL, COMPRISING THE STEPS OF: MAINTAINING THE SEMICONDUCTOR BODY WITHIN A FURNACE HEATED TO A PREDETERMINED TEMPERATURE; MAINTAINING ELEMENTAL PHOSPHORUS WITHIN SAID FURNACE IN A PREDETERMINED OXYGEN BEARING ATMOSPHERE TO THEREBY GENERATE ANHYDROUS PHOSPHORUS PENTOXIDE VAPORS WITHIN SAID FURNACE; AND TRANSPORTING THE PHOSPHORUS PENTOXIDE VAPORS GENERATED WITHIN SAID FURNACE PAST SAID SEMICONDUCTOR BODY TO THEREBY CAUSE DIFFUSION OF PHOSPHORUS ATOMS INTO THE SURFACE OF SAID SEMICONDUCTOR BODY.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-04-04 | 1969-10-04 | 1970-04-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-04-04 | 1973-10-04 | 1974-04-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-04-04 | 1977-10-04 | 1978-04-05 | $7700.00 | Window Closed / Lapsed |