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Patent US3170859A successfully refreshed from Google Patents.
US3170859A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for the preparation of silicon films
Assignee: Merck and Co Inc
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Filing: 1959-03-25
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Granted: 1965-02-23
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Expires: 1979-03-25
Abstract
No abstract record available.
Inventors
- 👤 Boudart Michel
- 👤 Peter I Pollak
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 23:51
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C01; C01B; C01B33/00; C01B33/02; C23; C23C; C23C16/00; C23C16/22; C23C16/24; C30B25/00; C30B25/02
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
100 words
THE METHOD OF FORMING A FILM OF HIGH PURITY SILICON ON A SUBSTRATE WHICH COMPRISES FLOWING HYDROGEN INTO A REACTION CHAMBER, PROVIDING A MASS OF SILICON AND A SUBSTRATE IN SAID CHAMBER WITH SAID SUBSTRATE DOWNSTREAM OF SAID MASS OF SILICON IN SAID HYDROGEN FLOW, EXPOSING SAID HYDROGEN TO A SOURCE OF ENERGY SUFFICIENT TOO DISASSOCIATE HYDROGEN GAS TO HYDROGEN ATOMS AT A POINT IN SAID CHAMBER WHERE SAID HYDROGEN ATOMS THUS GENERATED CONTACTAND REACT WITH SAID MASS OF SILICON TO FORM A SILICON HY DRIDE COMPLEX, AND EFFECTING DEPOSITION OF SILICON FROM SAID SILICON HYDRIDE COMPLEXES ON SAID SUBSTRATE.
Claim 2
Independent Claim
100 words
THE METHOD OF FORMING A FILM OF HIGH PURITY SILICON ON A SUBSTRATE WHICH COMPRISES FLOWING HYDROGEN INTO A REACTION CHAMBER, PROVIDING A MASS OF SILICON AND A SUBSTRATE IN SAID CHAMBER WITH SAID SUBSTRATE DOWNSTREAM OF SAID MASS OF SILICON IN SAID HYDROGEN FLOW, EXPOSING SAID HYDROGEN TO A SOURCE OF ENERGY SUFFICIENT TOO DISASSOCIATE HYDROGEN GAS TO HYDROGEN ATOMS AT A POINT IN SAID CHAMBER WHERE SAID HYDROGEN ATOMS THUS GENERATED CONTACTAND REACT WITH SAID MASS OF SILICON TO FORM A SILICON HY DRIDE COMPLEX, AND EFFECTING DEPOSITION OF SILICON FROM SAID SILICON HYDRIDE COMPLEXES ON SAID SUBSTRATE.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-02-23 | 1968-08-24 | 1969-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-02-23 | 1972-08-24 | 1973-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-02-23 | 1976-08-24 | 1977-02-23 | $7700.00 | Window Closed / Lapsed |