Sputtering cathode type glow discharge device vacuum pump

Claim 1

A GLOW DISCHARGE SPUTTER ION VACUUM PUMP APPARATUS INCLUDING: A VACUUM TIGHT ENVELOPE ADAPTED TO BE CONNECTED TO A STRUCTURE IT IS DESIRED TO EVACUATE; AN APERTURED ANODE ELECTRODE DEFINING A GLOW DISCHARGE PASSAGEWAY THERETHROUGH CONTAINED WITHIN SAID ENVELOPE; A SOLID SPUTTER CATHODE ELECTRODE DISPOSED ON ONE SIDE OF SAID ANODE ELECTRODE AND CONTAINED WITHIN SAID ENVELOPE; A SOLID COLLECTOR CATHODE ELECTRODE DISPOSED ON THE OPPOSITE SIDE OF SAID ANODE ELECTRODE AND CONTAINED WITHIN SAID ENVELOPE; AN APERTURED SPUTTER CATHODE ELECTRODE DISPOSED BETWEEN SAID ANODE AND SAID COLLECTOR CATHODE ELECTRODES; MEANS FOR APPLYING OPERATING POTENTIALS TO SAID ANODE, SPUTTER CATHODE AND COLLECTOR CATHODE ELECTRODES FOR INITIATING AND MAINTAINING A GLOW DISCHARGE, SAID COLLECTOR CATHODE ELECTRODE BEING MAINTAINED AT A POTENTIAL INTERMEDIATE WITH RESPECT TO SAID ANODE AND SPUTTER CATHODE ELECTRODE POTENTIALS, WHEREBY IONS FROM SAID GLOW DISCHARGE STRIKING SAID COLLECTOR CATHODE WILL CAUSE VERY LITTLE SPUTTERING THEREFROM; AND MEANS FOR PRODUCING AND DIRECTING A MAGNETIC FIELD THROUGH SAID ANODE, SPUTTER CATHODE AND COLLECTOR CATHODE ELECTRODES SO AS TO ENHANCE SAID GLOW DISCHARGE.