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US3140965A Expired / Lapsed US ⏱️ 0.0 years remaining

Vapor deposition onto stacked semiconductor wafers followed by particular cooling

Assignee: Siemens Schuckertwerke AG
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Filing: 1962-06-27
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Granted: 1964-07-14
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Expires: 1982-06-27
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Abstract

No abstract record available.

Inventors

  • 👤 Reuschel Konrad

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 13:39
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/08; Y; Y10; Y10S; Y10S148/00; Y10S148/049; Y10S148/106; Y10S438/00; Y10S438/914; Y10S438/916

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 140 words
THE PRECIPITATION METHOD OF PRODUCING ELECTRONIC SEMICONDUCTOR DEVICES HAVING A MONOCRYSTALLINE SEMICONDUCTOR BODY WITH A PLURALITY OF MONOCRYSTALLINE LAYERS OF RESPECTIVELY DIFFERENT ELECTRIC CONDUCTANCE PROPERTIES, WHICH COMPRISES STACKING IN A SEALABLE VESSEL A MULTIPLICITY OF PLATE MEMBERS HAVING ALTERNATELY DIFFERENT RESPECTIVE CONDUCTANCE PROPERTIES UPON EACH OTHER TO FORM AN AXIALLY ELONGATED STACK, SAID MEMBERS, CONSISTING OF SEMICONDUCTOR MONOCRYSTALS OF SUBSTANTIALLY THE SAME LATTICE STRUCTURE AS THE SEMICONDUCTOR SUBSTANCE TO BE PRECIPITATED; SUBJECTING THE STACK IN THE VESSEL TO A REACTION GAS WHICH CONTAINS A HALOGEN COMPUND OF SEMICONDUCTOR SUBSTANCE TO BE PRECIPITATED; HEATING THE STACK IN THE PRESENCE OF THE REACTION GAS TO A TEMPERATURE AT WHICH THE SEMICONDUCTOR SUBSTANCE IS PRECIPITATED FROM THE HALOGEN COMPOUND, AND PRODUCING A TEMPERATURE GRADIENT FROM ONE TO THE OTHER END OF THE STACK WITH THE HIGHER TEMPERATURE NEAR THE BOTTOM OF THE STACK.
Claim 2
Dependent Claim 140 words
THE PRECIPITATION METHOD OF PRODUCING ELECTRONIC SEMICONDUCTOR DEVICES HAVING A MONOCRYSTALLINE SEMICONDUCTOR BODY WITH A PLURALITY OF MONOCRYSTALLINE LAYERS OF RESPECTIVELY DIFFERENT ELECTRIC CONDUCTANCE PROPERTIES, WHICH COMPRISES STACKING IN A SEALABLE VESSEL A MULTIPLICITY OF PLATE MEMBERS HAVING ALTERNATELY DIFFERENT RESPECTIVE CONDUCTANCE PROPERTIES UPON EACH OTHER TO FORM AN AXIALLY ELONGATED STACK, SAID MEMBERS, CONSISTING OF SEMICONDUCTOR MONOCRYSTALS OF SUBSTANTIALLY THE SAME LATTICE STRUCTURE AS THE SEMICONDUCTOR SUBSTANCE TO BE PRECIPITATED; SUBJECTING THE STACK IN THE VESSEL TO A REACTION GAS WHICH CONTAINS A HALOGEN COMPUND OF SEMICONDUCTOR SUBSTANCE TO BE PRECIPITATED; HEATING THE STACK IN THE PRESENCE OF THE REACTION GAS TO A TEMPERATURE AT WHICH THE SEMICONDUCTOR SUBSTANCE IS PRECIPITATED FROM THE HALOGEN COMPOUND, AND PRODUCING A TEMPERATURE GRADIENT FROM ONE TO THE OTHER END OF THE STACK WITH THE HIGHER TEMPERATURE NEAR THE BOTTOM OF THE STACK.

References Cited (Backward Citations)

US2817799A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1967-07-14 1968-01-13 1968-07-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1971-07-14 1972-01-13 1972-07-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1975-07-14 1976-01-13 1976-07-14 $7700.00 Window Closed / Lapsed

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