Patent US3131476A successfully refreshed from Google Patents.
US3131476A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Production of semiconductor blanks
Assignee: Lanteris Space LLC
•
Filing: 1963-03-21
•
Granted: 1964-05-05
•
Expires: 1983-03-21
Abstract
No abstract record available.
Inventors
- 👤 Henry W Seher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:08
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0428; B; B23; B23Q; B23Q3/00; B23Q7/00; B23Q7/14; B23Q7/1426; B25; B25B; B25B11/00; B25B11/005
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
129 words
A MACHINE FOR PERFORMING WORK ON ONE SIDE OF A WAFER, COMPRISING A MOVABLE WORK-PERFORMING TOOL, A MOVABLE WAFER-SUPPORTING ASSEMBLY INCLUDING THREE SEPARATE MEMBERS ARRANGED IN SUPERIMPOSED RELATION AND NORMALLY FREE FROM EACH OTHER, THE LOWER MEMBER HAVING MEANS FOR LOCATING THE INTERMEDIATE MEMBERS IN PREDETERMINED POSITION WITH RESPECT TO SAID TOOL, THE UPPER MEMBER HAVING A SURFACE FOR SEATING OF A WAFER THEREON, MEANS FOR INDUCING SUCTION BETWEEN SAID MEMBERS AND BETWEEN SAID SURFACE AND A WAFER THEREON TO MAINTAIN SAID MEMBERS AND THE WAFER IN SUPERIMPOSED ENGAGEMENT, THE AFORESAID SUCTION INDUCING MEANS INCORPORATING CONTROL MEANS FOR INTERRUPTING THE SUCTION BETWEEN THE LOWER AND INTERMEDIATE MEMBERS WHILE MAINTAINING SUCTION BETWEEN THE INTERMEDIATE AND UPPER MEMBERS AND BETWEEN THE UPPER MEMBER AND WAFER TO PROVIDE FOR DISASSOCIATION OF SAID
Claim 2
Dependent Claim
129 words
A MACHINE FOR PERFORMING WORK ON ONE SIDE OF A WAFER, COMPRISING A MOVABLE WORK-PERFORMING TOOL, A MOVABLE WAFER-SUPPORTING ASSEMBLY INCLUDING THREE SEPARATE MEMBERS ARRANGED IN SUPERIMPOSED RELATION AND NORMALLY FREE FROM EACH OTHER, THE LOWER MEMBER HAVING MEANS FOR LOCATING THE INTERMEDIATE MEMBERS IN PREDETERMINED POSITION WITH RESPECT TO SAID TOOL, THE UPPER MEMBER HAVING A SURFACE FOR SEATING OF A WAFER THEREON, MEANS FOR INDUCING SUCTION BETWEEN SAID MEMBERS AND BETWEEN SAID SURFACE AND A WAFER THEREON TO MAINTAIN SAID MEMBERS AND THE WAFER IN SUPERIMPOSED ENGAGEMENT, THE AFORESAID SUCTION INDUCING MEANS INCORPORATING CONTROL MEANS FOR INTERRUPTING THE SUCTION BETWEEN THE LOWER AND INTERMEDIATE MEMBERS WHILE MAINTAINING SUCTION BETWEEN THE INTERMEDIATE AND UPPER MEMBERS AND BETWEEN THE UPPER MEMBER AND WAFER TO PROVIDE FOR DISASSOCIATION OF SAID
References Cited (Backward Citations)
US1115333A
Cited
US1666634A
Cited
US2357206A
Cited
US2367839A
Cited
US2527338A
Cited
US2984949A
Cited
US3052479A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1967-05-05 | 1967-11-04 | 1968-05-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1971-05-05 | 1971-11-04 | 1972-05-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1975-05-05 | 1975-11-04 | 1976-05-05 | $7700.00 | Window Closed / Lapsed |