US3108915A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Selective diffusion technique
Assignee: AT&T Inc
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Filing: 1961-06-30
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Granted: 1963-10-29
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Expires: 1981-06-30
Abstract
No abstract record available.
Inventors
- 👤 Joseph R Ligenza
- 👤 Herbert M Shapiro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:20
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0042; C; C23; C23C; C23C16/00; C23C16/04; C23C16/047; C30; C30B; C30B31/00; C30B31/06; C30B31/18; C30B31/185; G03F1/00; G03F1/54; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/944
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
101 words
A METHOD FOR DIFFUSING SELECTIVELY AN IMPURITY INTO A SEMICONDUCTOR WAFER HAVING A SURFACE, SAID METHOD COMPRISING THE STEPS OF EXOSING SAID SURFACE TO A GASEOUS MIXTURE INCLUDING SAID IMPURITY AND A DISSOCIABLE GAS SELECTED FROM THE CLASS CONSISTING OF BF2, CL2, I2, HBR, HCL, HI,O2 AND ''I AND IN THE ABSENCE OF ADDITIONAL REACTANTS AND DIRECTING AT SAID SURFACE RADIATION IN ACCORDANCE WITH A PATTERN THUS FORMING IRRADIATED AND SHADOWED AREAS ON SAID SURFACE, SAID RADIATION BEING OFA WAVELENGTH TO DISSOCIATE SAID DISSOCIABLE GAS AND FOR A TIME TO DIFFUSE SAID IMPURITY INTO THE SHADOWED AREAS OF SAID SURFACE ONLY.
Claim 2
Independent Claim
101 words
A METHOD FOR DIFFUSING SELECTIVELY AN IMPURITY INTO A SEMICONDUCTOR WAFER HAVING A SURFACE, SAID METHOD COMPRISING THE STEPS OF EXOSING SAID SURFACE TO A GASEOUS MIXTURE INCLUDING SAID IMPURITY AND A DISSOCIABLE GAS SELECTED FROM THE CLASS CONSISTING OF BF2, CL2, I2, HBR, HCL, HI,O2 AND ''I AND IN THE ABSENCE OF ADDITIONAL REACTANTS AND DIRECTING AT SAID SURFACE RADIATION IN ACCORDANCE WITH A PATTERN THUS FORMING IRRADIATED AND SHADOWED AREAS ON SAID SURFACE, SAID RADIATION BEING OFA WAVELENGTH TO DISSOCIATE SAID DISSOCIABLE GAS AND FOR A TIME TO DIFFUSE SAID IMPURITY INTO THE SHADOWED AREAS OF SAID SURFACE ONLY.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1966-10-28 | 1967-04-29 | 1967-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1970-10-28 | 1971-04-29 | 1971-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1974-10-28 | 1975-04-29 | 1975-10-29 | $7700.00 | Window Closed / Lapsed |