US3101280A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of preparing indium antimonide films
Assignee: International Business Machines Corp
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Filing: 1961-04-05
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Granted: 1963-08-20
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Expires: 1981-04-05
Abstract
No abstract record available.
Inventors
- 👤 Benjamin C Harrison
- 👤 Edwin H Tompkins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 02:27
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/301; H; H01; H01B; H01B1/00; Y; Y10; Y10S; Y10S148/00; Y10S148/056; Y10S420/00; Y10S420/903
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
71 words
THE METHOD OF FORMING SEMICONDUCTIVE FILMS ON A SUBSTRATE PLACED IN AN EVACUATED CHAMBER COMPRISING THE STEPS OF, REACTING VAPORS OF TRIMETHYLINDIUM AND STIBINE OVER SAID SUBSTRATE AT ROOM TEMPERATURE AND AT A PRESSURE OF ABOUT 2 MM. TO FORM A COATING ON SAID SUBSTRATE AND HEATING SAID SUBSTRATE TO A TEMPERATURE IN THE RANGE OF 150* C. FOR DECOMPOSING SAID COATING TO FORM AN INDIUM ANTIMONIDE FILM ON SAID SUBSTRATE.
Claim 2
Independent Claim
71 words
THE METHOD OF FORMING SEMICONDUCTIVE FILMS ON A SUBSTRATE PLACED IN AN EVACUATED CHAMBER COMPRISING THE STEPS OF, REACTING VAPORS OF TRIMETHYLINDIUM AND STIBINE OVER SAID SUBSTRATE AT ROOM TEMPERATURE AND AT A PRESSURE OF ABOUT 2 MM. TO FORM A COATING ON SAID SUBSTRATE AND HEATING SAID SUBSTRATE TO A TEMPERATURE IN THE RANGE OF 150* C. FOR DECOMPOSING SAID COATING TO FORM AN INDIUM ANTIMONIDE FILM ON SAID SUBSTRATE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1966-08-19 | 1967-02-18 | 1967-08-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1970-08-19 | 1971-02-18 | 1971-08-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1974-08-19 | 1975-02-18 | 1975-08-20 | $7700.00 | Window Closed / Lapsed |