Patent US2996418A successfully refreshed from Google Patents.
US2996418A
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Method and apparatus for vapor depositing thin films
Assignee: Motors Liquidation Co
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Filing: 1957-06-05
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Granted: 1961-08-15
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Expires: 1977-06-05
Abstract
No abstract record available.
Inventors
- 👤 Carl E Bleil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 08:40
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021; C23C14/22; C23C14/24; C23C14/26; G; G11; G11B; G11B5/00; G11B5/84; G11B5/85; H; H01; H01F; H01F1/00; H01F1/01; H01F1/03; H01F1/0302; H01F1/0311; H01F1/0313; H01F1/0315; Y; Y10; Y10T; Y10T156/00; Y10T156/10; Y10T156/1052
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
143 words
A METHOD FOR THE MAKING OF THIN FILMS OF METAL OXIDES BY EVAPORATION COMPRISING THE FOLLOWING STEPS: SUPPORTING A METAL TO BE EVAPORATED IN A CRUCIBLE, PLACING SAID CRUCIBLE IN A CHAMBER, COATING A SUITABLE SUBSTRATE MATERIAL WITH A WETTING AGENT, PLACING SAID SUBSTRATE MATERIAL IN SAID CHAMBER SPACED ABOVE SAID CRUCIBLE, EVACUATING SAID CHAMBER, HEATING SAID METAL, THEREAFTER INTRODUCING OXYGEN GAS INTO A REGION OF SAID CHAMBER SPACED FROM SAID METAL AND ADJACENT SAID SUBSRATE MATERIAL, SHIELDING SAID METAL TO SUBSTANTIALLY INHIBIT CONTACT AND INTERACTION WITH SAID OXYGEN BEFORE ALMOST COMPLETE EVAPORATION OF SAID METAL, EVAPORATING SAID METAL THROUGH AN APERTURE IN SAID SHIELDING MEANS INTO SAID OXYGEN ATMOSPHERE, CONDENSING THE RESULTING REACTION PRODUCTS OF THE VAPORIZED METAL AND THE GAS AS A METAL OXIDE FILM ON SAID SUBSTRATE MATERIAL, REMOVING THE THUS COATED SUBSTRATE MATERIAL FROM SAID CHAMBER, IMMERSING SAID COATED
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1964-08-14 | 1965-02-13 | 1965-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1968-08-14 | 1969-02-13 | 1969-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1972-08-14 | 1973-02-13 | 1973-08-15 | $7700.00 | Window Closed / Lapsed |