Patent US2886502A successfully refreshed from Google Patents.
US2886502A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cathodic sputtering of metal and dielectric films
Assignee: Edwards High Vacuum Ltd
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Filing: 1956-10-23
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Granted: 1959-05-12
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Expires: 1976-10-23
Abstract
No abstract record available.
Inventors
- 👤 Holland Leslie Arthur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:17
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; C; C23; C23C; C23C14/00; C23C14/04; C23C14/22; C23C14/34; C23C14/3464; Y; Y10; Y10S; Y10S148/00; Y10S148/146; Y10S148/158; Y10S148/169
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
128 words
A METHOD OF CATHODIC SPUTTERING A FILM OF AT LEAST ONE GIVEN SUBSTANCE ON TO A WORKPIECE WHICH CONSISTS IN SUPPORTING THE WORKPIECE IN A VACUUM CHAMBER FOR ROTATION ABOUT AN AXIS, POSITIONING AT LEAST TWO FIXED CATHODES IN THE VACUUM CHAMBER ANGULARLY SPACED WITH RESPECT TO SAID AXIS OF ROTATION AND SPACED FROM THE WORKPIECE ALONG THE SAID AXIS, SAID CATHODES BEING OF THE SAME SUBSTANCE TO BE SPUTTERED, EFFECTING ROTATION OF THE WORKPIECE AND CONNECTING THE CATHODES TO A SOURCE OF POTENTIAL TO DEPOSIT A FILM ON TO THE WORKPIECE BY CATHODIC SPUTTERING FROM THE CATHODES DURING THE ROTATION OF THE WORKPIECE, THE METHOD FURTHER COMPRISING FORMING A FURTHER FILM ON TO THE WORKPIECE BY VAPOUR DEPOSITION FROM A SOURCE OF VAPOR POSITIONED WITHIN THE CHAMBER.
Claim 2
Independent Claim
128 words
A METHOD OF CATHODIC SPUTTERING A FILM OF AT LEAST ONE GIVEN SUBSTANCE ON TO A WORKPIECE WHICH CONSISTS IN SUPPORTING THE WORKPIECE IN A VACUUM CHAMBER FOR ROTATION ABOUT AN AXIS, POSITIONING AT LEAST TWO FIXED CATHODES IN THE VACUUM CHAMBER ANGULARLY SPACED WITH RESPECT TO SAID AXIS OF ROTATION AND SPACED FROM THE WORKPIECE ALONG THE SAID AXIS, SAID CATHODES BEING OF THE SAME SUBSTANCE TO BE SPUTTERED, EFFECTING ROTATION OF THE WORKPIECE AND CONNECTING THE CATHODES TO A SOURCE OF POTENTIAL TO DEPOSIT A FILM ON TO THE WORKPIECE BY CATHODIC SPUTTERING FROM THE CATHODES DURING THE ROTATION OF THE WORKPIECE, THE METHOD FURTHER COMPRISING FORMING A FURTHER FILM ON TO THE WORKPIECE BY VAPOUR DEPOSITION FROM A SOURCE OF VAPOR POSITIONED WITHIN THE CHAMBER.
Claim 3
Dependent Claim
121 words
APPARATUS FOR CATHODIC SPUTTERING A FILM OF AT LEAST ONE GIVEN SUBSTANCE ON TO A WORKPIECE COMPRISING A VACUUM CHAMBER, A WORK-TABLE SUPPORTED IN SAID CHAMBER FOR CONTINUOUS ROTATION ABOUT A VERTICAL AXIS FOR ROTATING THE WORKPIECE ABOUT SAID AXIS, AT LEAST TWO SECTOR-SHAPED FIXED STATIONARY CATHODES OF THE SAME SUBSTANCE TO BE SPUTTERED SPACED FROM THE SAID TABLE ALONGTHE AXIS OF ROTATION THEREOF AND RELATIVELY ANGULARLY SPACED WITH RESPECT TO SAID AXIS, MEANS FOR CONNECTING THE CATHODES TO A SOURCE OF POTENTIAL FOR EFFECTING CATHODIC SPUTTERING OF THE SUBSTANCE ON TO THE WORKPIECE, A VAPOR SOURCE POSITIONED WITH THE CHAMBER FOR DEPOSITING A FILM ON TO THE WORKPIECE BY EVAPORATION, AND MEANS FOR CONTINUOUSLY ROTATING THE WORKPIECE ABOUT SAID AXIS.
Claim 4
Dependent Claim
121 words
APPARATUS FOR CATHODIC SPUTTERING A FILM OF AT LEAST ONE GIVEN SUBSTANCE ON TO A WORKPIECE COMPRISING A VACUUM CHAMBER, A WORK-TABLE SUPPORTED IN SAID CHAMBER FOR CONTINUOUS ROTATION ABOUT A VERTICAL AXIS FOR ROTATING THE WORKPIECE ABOUT SAID AXIS, AT LEAST TWO SECTOR-SHAPED FIXED STATIONARY CATHODES OF THE SAME SUBSTANCE TO BE SPUTTERED SPACED FROM THE SAID TABLE ALONGTHE AXIS OF ROTATION THEREOF AND RELATIVELY ANGULARLY SPACED WITH RESPECT TO SAID AXIS, MEANS FOR CONNECTING THE CATHODES TO A SOURCE OF POTENTIAL FOR EFFECTING CATHODIC SPUTTERING OF THE SUBSTANCE ON TO THE WORKPIECE, A VAPOR SOURCE POSITIONED WITH THE CHAMBER FOR DEPOSITING A FILM ON TO THE WORKPIECE BY EVAPORATION, AND MEANS FOR CONTINUOUSLY ROTATING THE WORKPIECE ABOUT SAID AXIS.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1962-05-11 | 1962-11-10 | 1963-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1966-05-11 | 1966-11-10 | 1967-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1970-05-11 | 1970-11-10 | 1971-05-12 | $7700.00 | Window Closed / Lapsed |