Method for enhancing deposition rate of chemical vapor deposition films

Claim 2

1 . A chemical vapor deposition method for producing an organosilica porous film represented by the formula Si v O w C x H y F z , where v+w+x+y+z=100%, v is from 10 to 35 atomic %, w is from 10 to 65 atomic %, x is from 5 to 30 atomic %, y is from 10 to 50 atomic %, and z is from 0 to 15 atomic %, the method comprising: providing a substrate within a reaction chamber; introducing into the reaction chamber chemical reagents comprising an at least one organosilicon precursor, an organic precursor, and a rate enhancer wherein the chemical reagents are in gaseous form; applying energy to the chemical reagents in the reaction chamber sufficient to react and deposit a multiphasic film onto at least a portion of the substrate wherein the multiphasic film comprises at least one structure-forming phase and at least one pore-forming phase; and exposing the multiphasic film to an energy source sufficient to substantially remove the pore-forming phase contained therein and provide the porous organosilica film comprising a plurality of pores and a dielectric constant of 2.6 or less.

Claim 3

2 . The method of claim 1 further comprising treating the porous film with an at least one post-treating agent selected from the group consisting of thermal energy, plasma energy, photon energy, electron energy, microwave energy, chemicals, and mixtures thereof.

Claim 4

3 . The method of claim 2 wherein the treating step occurs after the completion of the exposing step.

Claim 5

4 . The method of claim 2 wherein the treating step occurs during at least a portion of the exposing step.

Claim 6

5 . The method of claim 2 wherein the at least one post-treating agent is electron energy provided by an electron beam.

Claim 7

6 . The method of claim 2 wherein the at least one post-treating agent is a supercritical fluid.

Claim 8

7 . The method of claim 1 wherein the porous film has a dielectric constant of 1.9 or less.

Claim 9

8 . The method of claim 1 wherein v is from 20 to 30 atomic %, w is from 20 to 45 atomic %, x is from 5 to 20 atomic %, y is from 15 to 40 atomic % and z is 0.

Claim 10

9 . The method of claim 1 wherein the temperature of the applying step ranges from 25 to 450° C.

Claim 11

10 . The method of claim 9 wherein the temperature of the applying step ranges from 2000 to 450° C.

Claim 12

11 . The method of claim 1 wherein the rate enhancer compound is at least one oxygen-containing compound selected from the group consisting of oxygen (O 2 ), ozone (O 3 ), nitrous oxide (N 2 O), hydrogen peroxide (H 2 O 2 ), nitrogen dioxide (NO 2 ).

Claim 13

12 . The method of claim 1 wherein the rate enhancer compound is at least one fluorine-containing compound selected from the group consisting of fluorine (F 2 ), silicon tetrafluoride (SiF 4 ), nitrogen trifluoride (NF 3 ), compounds of the formula C n F 2n+2 wherein n is a number ranging from 1 to 4, and sulfur hexafluoride (SF 6 ).

Claim 14

13 . The method of claim 1 wherein the rate enhancer compound compound is at least one heavy inert gas selected from the group consisting of Ar, Xe, and Kr.

Claim 15

14 . The method of claim 1 wherein the rate enhancer compound is a peroxide compound having the formula R 1 OOOR 2 wherein R 1 and R 2 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group.

Claim 16

15 . The method of claim 1 wherein the rate enhancer compound is a peracid compounds having the formula R 3 C(O)OC(O)R 4 wherein R 3 and R 4 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group.

Claim 17

16 . The method of claim 1 wherein the rate enhancer and the at least one organosilicon precursor comprise the same compound.

Claim 18

17 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; and wherein n is 1 to 3 and p is 0 to 3.

Claim 19

18 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—O—SiR 3 m O(O)CR 5 ) q (O R 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; and wherein n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3 provided that n+m≧1, n+p≦3 and m+q≦3.

Claim 20

19 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; and wherein n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, n+p≧3 and m+q≦3.

Claim 21

20 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; and wherein n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, and n+p≦3, and m+q≦3.

Claim 22

21 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; and wherein n is 1 to 3, p is 0 to 3, and t is 2 to 4, provided that n+p≦4.

Claim 23

22 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon; and wherein n is 1 to 3, p is 0 to 3 and t is 1 to 3, provided that n+p≦4.

Claim 24

23 . The method of claim 1 wherein the at least one organosilicon precursor is represented by the formula: (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated; and x may be any integer from 2 to 8.

Claim 25

24 . The method of claim 1 wherein the at least one precursor is represented by cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated; and x may be any integer from 2 to 8.

Claim 26

25 . The method of claim 1 wherein the at least one precursor is represented by cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated; and x may be any integer from 2 to 8.

Claim 27

26 . The method of claim 1 wherein the at least one organosilicon precursor is a mixture comprising a first organosilicon precursor having 2 Si—O bonds or less and a second organosilicon precursor having 3 Si—O bonds or greater.

Claim 28

27 . The method of claim 1 wherein the at least one organosilicon precursor is a member selected from the group consisting of diethoxymethylsilane, dimethoxymethylsilane, di-isopropoxymethylsilane, di-t-butoxymethylsilane, methyltriethoxysilane, methyltrimethoxysilane, methyltri-isopropoxysilane, methyltri-t-butoxysilane, dimethyldimethoxysilane, dimethyldiethoxysilane, dimethyldiisopropoxysilane, dimethyldi-t-butoxysilane, 1,3,5,7-tetramethylcyclotatrasiloxane, octamethyl-cyclotetrasiloxane, tetraethoxysilane, and mixtures thereof.

Claim 29

28 . The method of claim 1 wherein the organic precursor is at least one member selected from the group represented by: (a) at least one cyclic hydrocarbon having a cyclic structure and the formula C n H 2n , where n is 4 to 14, a number of carbons in the cyclic structure is between 4 and 10, and the at least one cyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the cyclic structure; (b) at least one linear or branched, saturated, partially or multipally unsaturated hydrocarbon having the formula C n H ( 2n+2)−2y where n=2-20 and where y=0-n; (c) at least one singly or multipally unsaturated cyclic hydrocarbon having a cyclic structure and the formula C n H 2n−2x , where x is a number of unsaturated sites, n is 4 to 14, a number of carbons in the cyclic structure is between 4 and 10, and the at least one singly or multipally unsaturated cyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituents substituted onto the cyclic structure, and contains unsaturation inside endocyclic or on one of the hydrocarbon substituents; (d) at least one bicyclic hydrocarbon having a bicyclic structure and the formula C n H 2n−2 , where n is 4 to 14, a number of carbons in the bicyclic structure is from 4 to 12, and the at least one bicyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the bicyclic structure; (e) at least one multipally unsaturated bicyclic hydrocarbon having a bicyclic structure and the formula C n H 2n−(2+2x) , where x is a number of unsaturated sites, n is 4 to 14, a number of carbons in the bicyclic structure is from 4 to 12, and the at least one multipally unsaturated bicyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituents substituted onto the bicyclic structure, and contains unsaturation inside endocyclic or on one of the hydrocarbon substituents; (f) at least one tricyclic hydrocarbon having a tricyclic structure and the formula C n H 2n−4 , where n is 4 to 14, a number of carbons in the tricyclic structure is from 4 to 12, and the at least one tricyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the cyclic structure; and mixtures thereof.

Claim 30

29 . The method of claim 1 wherein the organic precursor is at least one member selected from a group consisting of alpha-terpinene, limonene, cyclohexane, 1,2,4-trimethylcyclohexane, 1,5-dimethyl-1,5-cyclooctadiene, camphene, adamantane, 1,3-butadiene, substituted dienes, decahydronaphthelene, dimethylbutadiene, hexadiene, and mixtures thereof.

Claim 31

30 . The method of claim 1 wherein the at least one organosilicon precursor and the rate enhancer comprise the same compound.

Claim 32

31 . A method for enhancing the chemical vapor deposition of a film comprising an organic species, the method comprising: providing a substrate within a reaction chamber; introducing into the chamber gaseous chemical reagents comprising an organic precursor having carbon and hydrogen bonds contained therein and a rate enhancer compound wherein the rate enhancer is at least one member selected from the group consisting of an oxygen-containing; a peroxide compound having the formula R 1 OOR 2 wherein R 1 and R 2 are independently a hydrogen, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; a peracid compound having the formula R 3 C(O)OC(O)R 4 wherein R 3 and R 4 are independently a hydrogen, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; a fluorine-containing compound; and a heavy inert gaseous compound; and applying energy to the chemical reagents in the reaction chamber sufficient to induce the reaction of the reagents and deposit the film upon at least a portion of the substrate.

Claim 33

31 . A method for enhancing the chemical vapor deposition of a film comprising an organic species, the method comprising: providing a substrate within a reaction chamber; introducing into the chamber gaseous chemical reagents comprising an organic precursor having carbon and hydrogen bonds contained therein and a rate enhancer compound wherein the rate enhancer is at least one member selected from the group consisting of an oxygen-containing; a peroxide compound having the formula R 1 OOR 2 wherein R 1 and R 2 are independently a hydrogen, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; a peracid compound having the formula R 3 C(O)OC(O)R 4 wherein R 3 and R 4 are independently a hydrogen, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; a fluorine-containing compound; and a heavy inert gaseous compound; and applying energy to the chemical reagents in the reaction chamber sufficient to induce the reaction of the reagents and deposit the film upon at least a portion of the substrate.

Claim 34

32 . The method of claim 31 wherein the chemical reagents further comprises an at least one organosilicon precursor.

Claim 35

33 . The method of claim 31 wherein the rate enhancer compound is at least one oxygen-containing compound selected from the group consisting of oxygen (O 2 ), ozone (O 3 ), nitrous oxide (N 2 O), hydrogen peroxide (H 2 O 2 ), nitrogen dioxide (NO 2 ).

Claim 36

34 . The method of claim 31 wherein the rate enhancer compound is at least one fluorine-containing compound selected from the group consisting of fluorine (F 2 ), silicon tetrafluoride (SiF 4 ), nitrogen trifluoride (NF 3 ), compounds of the formula C n F 2n+2 wherein n is a number ranging from 1 to 4, and sulfur hexafluoride (SF 6 ).

Claim 37

35 . The method of claim 31 wherein the rate enhancer compound compound is at least one heavy inert gas selected from the group consisting of Ar, Xe, and Kr.

Claim 38

36 . The method of claim 31 wherein the rate enhancer compound is a peroxide compound having the formula R 1 OOR 2 wherein R 1 and R 2 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group.

Claim 39

37 . The method of claim 31 wherein the rate enhancer compound is a peracid compounds having the formula R 3 C(O)OC(O)R 4 wherein R 3 and R 4 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group.

Claim 40

38 . The method of claim 31 wherein the rate enhancer and the at least one organosilicon precursor comprise the same compound.

Claim 41

39 . A method for forming a porous organosilica glass film, the method comprising: providing a substrate within a reaction chamber; flowing into the reaction chamber a first chemical reagent comprising an at least one organosilicon precursor; flowing into the reaction chamber a second chemical reagent comprising an at least one organic precursor distinct from the first chemical reagent and a rate enhancer; applying energy to the first and second chemical reagents in the reaction chamber sufficient to induce the reaction of the reagents and form a multiphasic film comprising at least one structure-former phase and at least one pore-former phase onto at least a portion of the substrate; and removing substantially all of the at least one pore-former phase from the multiphasic film to provide the porous organosilica glass film.

Claim 42

39 . A method for forming a porous organosilica glass film, the method comprising: providing a substrate within a reaction chamber; flowing into the reaction chamber a first chemical reagent comprising an at least one organosilicon precursor; flowing into the reaction chamber a second chemical reagent comprising an at least one organic precursor distinct from the first chemical reagent and a rate enhancer; applying energy to the first and second chemical reagents in the reaction chamber sufficient to induce the reaction of the reagents and form a multiphasic film comprising at least one structure-former phase and at least one pore-former phase onto at least a portion of the substrate; and removing substantially all of the at least one pore-former phase from the multiphasic film to provide the porous organosilica glass film.

Claim 43

40 . The method of claim 39 wherein the first flowing step is conducted prior to and/or during at least a portion of the second flowing step.

Claim 44

41 . The method of claim 39 wherein the first flowing step and the second flowing step are alternated.

Claim 45

42 . A composition comprising: (A) at least one organosilicon precursor selected from the group consisting of: (a) a compound of the formula R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 1 to 3 and p is 0 to 3; (b) a compound of the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—O—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, n+p≦3 and m+q≦3; (c) a compound of the formula R 1 n(OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, n+p≦3 and m+q≦3; (d) a compound of the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, and n+p≦3, and m+q≦3; (e) a compound of the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 1 to 3, p is 0 to 3, and t is 2 to 4, provided that n+p≦4; (f) a compound of the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 1 to 3, p is 0 to 3 and t is 1 to 3, provided that n+p≦4; (g) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated, and x may be any integer from 2 to 8; (h) cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated, and x may be any integer from 2 to 8; and (i) cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated, and x may be any integer from 2 to 8; and (B) at least one organic precursor selected from the group consisting of: (a) at least one cyclic hydrocarbon having a cyclic structure and the formula C n H 2n , where n is 4 to 14, a number of carbons in the cyclic structure is between 4 and 10, and the at least one cyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the cyclic structure; (b) at least one linear or branched, saturated, partially or multipally unsaturated hydrocarbon of the general formula C n H (2n+2)−2y where n=2-20 and where y=0-n; (c) at least one singly or multipally unsaturated cyclic hydrocarbon having a cyclic structure and the formula C n H 2n−2x , where x is a number of unsaturated sites, n is 4 to 14, a number of carbons in the cyclic structure is between 4 and 10, and the at least one singly or multipally unsaturated cyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituents substituted onto the cyclic structure, and contains endocyclic unsaturation or unsaturation on one of the hydrocarbon substituents; (d) at least one bicyclic hydrocarbon having a bicyclic structure and the formula C n H 2n−2 , where n is 4 to 14, a number of carbons in the bicyclic structure is from 4 to 12, and the at least one bicyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the bicyclic structure; (e) at least one multipally unsaturated bicyclic hydrocarbon having a bicyclic structure and the formula C n H 2n−(2+2x) , where x is a number of unsaturated sites, n is 4 to 14, a number of carbons in the bicyclic structure is from 4 to 12, and the at least one multipally unsaturated bicyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituents substituted onto the bicyclic structure, and contains endocyclic unsaturation or unsaturation on one of the hydrocarbon substituents; and/or (f) at least one tricyclic hydrocarbon having a tricyclic structure and the formula C n H 2n−4 , where n is 4 to 14, a number of carbons in the tricyclic structure is from 4 to 12, and the at least one tricyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the cyclic structure; and (C) optionally a rate enhancer compound wherein the rate enhancer selected from the group consisting of: (a) a peroxide compound having the formula R 1 OOR 2 wherein R 1 and R 2 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; (b) a peracid compound having the formula R 3 C(O)OC(O)R 4 wherein R 3 and R 4 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; (c) a heavy inert gases such as argon (Ar), xenon (Xe), and krypton (Kr).

Claim 46

42 . A composition comprising: (A) at least one organosilicon precursor selected from the group consisting of: (a) a compound of the formula R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 1 to 3 and p is 0 to 3; (b) a compound of the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—O—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, n+p≦3 and m+q≦3; (c) a compound of the formula R 1 n(OR 2 ) p (O(O)CR 4 ) 3−n−p Si—SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 and R 6 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, n+p≦3 and m+q≦3; (d) a compound of the formula R 1 n (OR 2 ) p (O(O)CR 4 ) 3−n−p Si—R 7 —SiR 3 m (O(O)CR 5 ) q (OR 6 ) 3−m−q where R 1 and R 3 are independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 , R 6 and R 7 are independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 4 and R 5 are independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 0 to 3, m is 0 to 3, q is 0 to 3 and p is 0 to 3, provided that n+m≧1, and n+p≦3, and m+q≦3; (e) a compound of the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t CH 4−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 1 to 3, p is 0 to 3, and t is 2 to 4, provided that n+p≦4; (f) a compound of the formula (R 1 n (OR 2 ) p (O(O)CR 3 ) 4−(n+p) Si) t NH 3−t where R 1 is independently H or C 1 to C 4 linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated hydrocarbon; R 2 is independently C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, R 3 is independently H, C 1 to C 6 linear or branched, saturated, singly or multipally unsaturated, cyclic, aromatic, partially or fully fluorinated hydrocarbon, n is 1 to 3, p is 0 to 3 and t is 1 to 3, provided that n+p≦4; (g) cyclic siloxanes of the formula (OSiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated, and x may be any integer from 2 to 8; (h) cyclic silazanes of the formula (NR 1 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated, and x may be any integer from 2 to 8; and (i) cyclic carbosilanes of the formula (CR 1 R 3 SiR 1 R 3 ) x , where R 1 and R 3 are independently H, C 1 to C 4 , linear or branched, saturated, singly or multipally unsaturated, cyclic, partially or fully fluorinated, and x may be any integer from 2 to 8; and (B) at least one organic precursor selected from the group consisting of: (a) at least one cyclic hydrocarbon having a cyclic structure and the formula C n H 2n , where n is 4 to 14, a number of carbons in the cyclic structure is between 4 and 10, and the at least one cyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the cyclic structure; (b) at least one linear or branched, saturated, partially or multipally unsaturated hydrocarbon of the general formula C n H (2n+2)−2y where n=2-20 and where y=0-n; (c) at least one singly or multipally unsaturated cyclic hydrocarbon having a cyclic structure and the formula C n H 2n−2x , where x is a number of unsaturated sites, n is 4 to 14, a number of carbons in the cyclic structure is between 4 and 10, and the at least one singly or multipally unsaturated cyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituents substituted onto the cyclic structure, and contains endocyclic unsaturation or unsaturation on one of the hydrocarbon substituents; (d) at least one bicyclic hydrocarbon having a bicyclic structure and the formula C n H 2n−2 , where n is 4 to 14, a number of carbons in the bicyclic structure is from 4 to 12, and the at least one bicyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the bicyclic structure; (e) at least one multipally unsaturated bicyclic hydrocarbon having a bicyclic structure and the formula C n H 2n−(2+2x) , where x is a number of unsaturated sites, n is 4 to 14, a number of carbons in the bicyclic structure is from 4 to 12, and the at least one multipally unsaturated bicyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituents substituted onto the bicyclic structure, and contains endocyclic unsaturation or unsaturation on one of the hydrocarbon substituents; and/or (f) at least one tricyclic hydrocarbon having a tricyclic structure and the formula C n H 2n−4 , where n is 4 to 14, a number of carbons in the tricyclic structure is from 4 to 12, and the at least one tricyclic hydrocarbon optionally contains a plurality of simple or branched hydrocarbons substituted onto the cyclic structure; and (C) optionally a rate enhancer compound wherein the rate enhancer selected from the group consisting of: (a) a peroxide compound having the formula R 1 OOR 2 wherein R 1 and R 2 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; (b) a peracid compound having the formula R 3 C(O)OC(O)R 4 wherein R 3 and R 4 are each independently a hydrogen atom, a linear or branched alkyl group having from 1 to 6 carbon atoms, or an aryl group; (c) a heavy inert gases such as argon (Ar), xenon (Xe), and krypton (Kr).