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US20030107770A1 Expired / Lapsed US ⏱️ 0.0 years remaining

Algorithm for adjusting edges of grayscale pixel-map images

Assignee: Applied Materials Inc
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Filing: 2001-07-11
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Granted: —
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Expires: 2021-07-11
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Abstract

Abstract An algorithm (method) for sizing (adjusting edges of) grayscale or dose level pixel-maps (raster images) real time for input into radiant beam lithography systems or similar dose level grayscale image rendering systems to compensate for systemic distortions such as edge bias and/or loss of linearity (i) successively assembles one or more frame matrixes of grayscale values from a parent pixel-map having edges and corners where an edge is defined by gray pixels having values between 1, 2, . . . n, or by pixels having at least one black (0-gray or dose level) neighbor; (ii) slides a sub-matrix window within each frame matrix, to find, calculate and store values for gradients perpendicular to the edges, and any comer within each frame matrix; (iii) loops over pixels within such sub-matrix window at each position within the frame matrix to adjust the grayscale value of each edge pixel found; and (iii) propagates a grayscale correction value to pixels inward or outward per the computed perpendicular gradient to establish a new edge position within each frame matrix, and where there is more than one frame matrix , (iv) reassembles the frame matrixes, thereby, generating a daughter grayscale or dose level pixel-map which upon projection and recording compensates for systemic distortions.

Inventors

  • 👤 Asher Klatchko
  • 👤 Samuel Howells
  • 👤 Michael Ward

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 14:12
CPC Classifications
H; H04; H04N; H04N1/00; H04N1/40; H04N1/409; H04N1/4092; G; G03; G03F; G03F1/00; G03F1/68; G03F1/76; G03F1/78; G03F7/00; G03F7/70; G03F7/70216; G03F7/70283; G03F7/70291; G06; G06T; G06T5/00; G06T5/73; G06T2207/00; G06T2207/20; G06T2207/20172; G06T2207/20192; G06T2207/30; G06T2207/30108; G06T2207/30148

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 267 words
1 . A sizing algorithm for sizing a parent grayscale pixel map expressing an image having edges using a computer, before projection onto a sensitive recording surface wherein the pixels have a size R p , comprising the steps of: (i) inputting the parent grayscale pixel map image with edges where an edge is defined by gray pixels having values between 1, 2, . . . n, or by pixels having at least one 0-gray value (black 0-dose level) pixel neighbor; (ii) calculating a grayscale correction value (g) equal to a sizing distance S parameterized by a machine constant equal to R p divided by the number of grayscale values; (iii) finding and flagging edge pixels expressed within a frame of the parent pixel map; and (iv) finding and flagging corner edge pixels within the frame; (v) sliding a sub-matrix window within the frame, to calculate and store gradient values for each edge pixel relative to the edges within the frame; (vi) looping over pixels within the frame to adjust the grayscale value of edge and corner pixels and neighboring pixels; (vii) propagating new grayscale values per the grayscale correction value (g) to pixels from each adjusted edge and comer pixel within the frame in a direction normal to each edge to establish a new edge position within the frame, and (viii) where the parent pixel map is composed of a plurality of frames, reassembling the frames generating a daughter grayscale pixel map expressing a different size image than that expressed in the parent pixel map system which upon projection and recording, compensates for expected systemic distortions.
Claim 2
Dependent Claim 267 words
1 . A sizing algorithm for sizing a parent grayscale pixel map expressing an image having edges using a computer, before projection onto a sensitive recording surface wherein the pixels have a size R p , comprising the steps of: (i) inputting the parent grayscale pixel map image with edges where an edge is defined by gray pixels having values between 1, 2, . . . n, or by pixels having at least one 0-gray value (black 0-dose level) pixel neighbor; (ii) calculating a grayscale correction value (g) equal to a sizing distance S parameterized by a machine constant equal to R p divided by the number of grayscale values; (iii) finding and flagging edge pixels expressed within a frame of the parent pixel map; and (iv) finding and flagging corner edge pixels within the frame; (v) sliding a sub-matrix window within the frame, to calculate and store gradient values for each edge pixel relative to the edges within the frame; (vi) looping over pixels within the frame to adjust the grayscale value of edge and corner pixels and neighboring pixels; (vii) propagating new grayscale values per the grayscale correction value (g) to pixels from each adjusted edge and comer pixel within the frame in a direction normal to each edge to establish a new edge position within the frame, and (viii) where the parent pixel map is composed of a plurality of frames, reassembling the frames generating a daughter grayscale pixel map expressing a different size image than that expressed in the parent pixel map system which upon projection and recording, compensates for expected systemic distortions.
Claim 3
Dependent Claim 22 words
2 . The algorithm of claim 1 where the frame is a 5×5 matrix, and the sub-matrix window is a 3×3 matrix.
Claim 4
Dependent Claim 162 words
3 . A sizing algorithm for downsizing a parent grayscale pixel map having pixels of size R p and grayscale values between 0, 1, 2, . . . n, expressing an image having edges with grayscale values ranging from 1, 2, . . . n, using a computer, before projection onto a sensitive recording surface comprising the steps of: calculating a factor g equal to a desired sizing distance S divided by a machine constant K m equal to pixel size R p divided by the number of grayscale values; setting G′(i, j) = Max(G(i, j) − g,0), and {right arrow over (δ)}G(i, j) = |G(i, j) − g|·(∇ x , ∇ y ) looping over pixels { if( pixel ij is an edge pixel) { ∇(i, j) = estimated gradient; storing the value G′(i, j) of the new pixel; if(∥{right arrow over (δ)}G(i, j)∥) > 0 { propagating vector differences to neighboring pixels along the gradient direction; } } } end.
Claim 5
Dependent Claim 162 words
3 . A sizing algorithm for downsizing a parent grayscale pixel map having pixels of size R p and grayscale values between 0, 1, 2, . . . n, expressing an image having edges with grayscale values ranging from 1, 2, . . . n, using a computer, before projection onto a sensitive recording surface comprising the steps of: calculating a factor g equal to a desired sizing distance S divided by a machine constant K m equal to pixel size R p divided by the number of grayscale values; setting G′(i, j) = Max(G(i, j) − g,0), and {right arrow over (δ)}G(i, j) = |G(i, j) − g|·(∇ x , ∇ y ) looping over pixels { if( pixel ij is an edge pixel) { ∇(i, j) = estimated gradient; storing the value G′(i, j) of the new pixel; if(∥{right arrow over (δ)}G(i, j)∥) > 0 { propagating vector differences to neighboring pixels along the gradient direction; } } } end.
Claim 6
Dependent Claim 164 words
4 . A sizing algorithm for upsizing a parent grayscale pixel map having pixels of size R p and grayscale values between 0, 1, 2, . . . n, expressing an image having edges with grayscale values ranging from 1, 2, . . . n, using a computer, before projection onto a sensitive recording surface comprising the steps of: calculating a factor g equal to a desired sizing distance S divided by a machine constant K m equal to pixel size R p divided by the number of grayscale values; setting G′(i, j) = Min(G(i, j) + g,gmax), and {right arrow over (δ)}G(i, j) = |gmax − {G(i, j) + g}|·(∇ x , ∇ y ) looping over pixels { if( pixel ij is an edge pixel) { ∇(i, j) = estimated gradient; storing the value G′(i, j) of the new pixel; if(∥{right arrow over (δ)}G(i, j)∥) > 0 { propagating vector differences to neighboring pixels along the gradient direction; } } } end.
Claim 7
Dependent Claim 164 words
4 . A sizing algorithm for upsizing a parent grayscale pixel map having pixels of size R p and grayscale values between 0, 1, 2, . . . n, expressing an image having edges with grayscale values ranging from 1, 2, . . . n, using a computer, before projection onto a sensitive recording surface comprising the steps of: calculating a factor g equal to a desired sizing distance S divided by a machine constant K m equal to pixel size R p divided by the number of grayscale values; setting G′(i, j) = Min(G(i, j) + g,gmax), and {right arrow over (δ)}G(i, j) = |gmax − {G(i, j) + g}|·(∇ x , ∇ y ) looping over pixels { if( pixel ij is an edge pixel) { ∇(i, j) = estimated gradient; storing the value G′(i, j) of the new pixel; if(∥{right arrow over (δ)}G(i, j)∥) > 0 { propagating vector differences to neighboring pixels along the gradient direction; } } } end.
Claim 8
Dependent Claim 103 words
5 . The sizing algorithm of claim 1 , or 3 or 4 wherein edge pixels are flagged by successively mapping a sub matrix array G of pixel grayscale values from the parent grayscale pixel map into a an edge matrix E with a Boolean procedure for counting the 0-gray value pixels and for assigning a value to each pixel of 0, 1, or 2, where 0 indicates a particular pixel is not an edge pixel, 1 indicates a particular pixel is in a class consisting of inclined edge pixels and corner pixels, and 2 indicates a particular pixel is an edge pixel.
Claim 9
Dependent Claim 18 words
6 . The sizing algorithm of claim 5 wherein the sub matrix array G is a 3×3 matrix.
Claim 10
Dependent Claim 50 words
7 . The sizing algorithm of claim 6 wherein diverging corner edge pixels are flagged by successively mapping each edge matrix E into a Boolean I returning true if E has an edge_sum equal to 5 indicating a particular edge pixel is a diverging corner edge pixel, else returning false.
Claim 11
Dependent Claim 99 words
8 . The sizing algorithm of claim 5 wherein new grayscale values are propagated normal to edges of the parent grayscale pixel map to new edge positions with: (i) a 45° rule computation operator for such edges inclined at 45° (π/4) relative to an orthogonal coordinate of the parent pixel map; and (ii) a non-45 20 rule computation operator for such edges inclined at angles other than 45° relative to an orthogonal coordinate of the parent pixel map; and (iii) a gray-to-neighbors computation operator for propagating gray values to pixels neighboring such edges in the direction of the gradient.

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