Production of a refractory metal by chemical vapor deposition of a bilayer-stacked tungsten metal

Abstract

Abstract Provided a process for producing a refractory metal by chemical vapor deposition of a bilayer-stacked tungsten metal by depositing a bilayer-stacked tungsten metal in a same chamber in the manner of not breaking the vacuum therein. Firstly, a layer of amorphous-like tungsten is deposited to increase thermal stability and to prevent diffusion of fluorine atom. Next, a nitridizing treatment is performed thereon to promote further the barrier property and thermal stability of the amorphous-like tungsten. Finally, conventional selective chemical vapor deposited tungsten having low is deposited on the amorphous-like tungsten. Through the deposition of bilayer tungsten according to the process of the invention, thermal stability of conventional selective chemical vapor deposited tungsten can be increased greatly. For the manufacture of a extremely large integrated circuit, stacked tungsten not only can prevent fluorine atom from diffusing downwardly in the course of deposition, but also can increase thermal stability, and furthermore, the resistance thereof is much lower that of tungsten disilicide. Accordingly, the process of the invention is indeed a technique having high potential.

Inventors

• 👤 Guo-Ming Jang
• 👤 Yi-Jung Deng
• 👤 Da-Shiun Ye

Bibliographic Details