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SE456872B
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DEVICE FOR STEP AND REPEATING SYSTEM FOR DIRECT EXPOSURE FOR PREPARING OR TREATMENT OF SEMICONDUCTOR DISCS WITH A CAMERA FOR EXPOSURE OF A PICTURE IMAGE
Assignee: American Semiconductor Equip
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Filing: 1988-03-09
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Granted: —
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Expires: 2008-03-09
Abstract
No abstract record available.
Inventors
- 👤 Peski C Van
- 👤 W L Meisenheimer
Bibliographic Details
Application Number
—
Jurisdiction
SE
Data Source
google_patents
Last Synchronized
2026-11-08 07:45
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7049; G03F9/7053; G03F9/7057; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/708; G03F7/70858; G03F7/70866
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