Probe card

Abstract

Abstract PURPOSE:To adjust the stylus force of a probe stylus whose projection length from a fixed frame is short by providing reinforcement parts which are set larger in sectional area than the probe stylus whose projection length is short to the intermediate parts of probe styli whose projection length from the fixed frame are long. CONSTITUTION:The probe card is equipped with the probe styli 4, 6a, and 6b whose projection lengths L1-L3 from the fixed frame 8 are different, and the probe styli 6a and 6b whose projection lengths L2 and L3 from the fixed frame 8 are long have the reinforcement parts (large-diameter parts 16a and 16b) which are set larger in sectional area than the probe stylus 4 whose projection length is short at their intermediate parts. Thus, the large-diameter parts 16a and 16b reinforce the probe styli 6a and 6b to obtain the same stylus force with the probe stylus 4, and the stylus force is irrelevant to the tip positions of the probe styli 4, 6a, and 6b. Further, the restoring performance, life, etc., can be made uniform and a decrease in measurement accuracy is eliminated.

Inventors

• 👤 Yoshiaki Amezutsumi

Bibliographic Details