Conveying device

Abstract

Abstract PURPOSE:To make it possible to use a conveying device suitably for conveying a plate-like material such as, for example, semiconductor wafers or the like by arranging a plurality of moving elements each having a head part adapted to move up and low, and back and forth in association with the respective leg part, and by conveying an article thereon. CONSTITUTION:Drive shafts 4 5 are driven by a drive device so that leg parts B are made to be stationary at first while leg parts A are moved upward by a predetermined distance, and then the lag parts A are made to be stationary while the leg parts B are moved upward by the same distance. Next, the leg parts B are made to be stationary while the leg parts A are moved downward by the same distance, and then the left parts A are made to be stationary while the leg parts B are moved downward by the same distance. Thus, through cycles P, Q, R and S, the operation is returned to the original condition before the first cycle, and accordingly, head parts C depict a sector-like sequence locus as shown. Further, there are provided stationary support rods G, G..., whose tops comes to the same height as that of the head parts C upon completion of the cycle P or R. If a wafer U is supported by the head parts C during the cycles Q and P while it is supported by the stationary supports rods G during the cycles S, P, and wafer may be moved by one stroke in the direction Y by the motion of the one cycle.

Inventors

• 👤 Yasuo Kita
• 👤 Jiro Hida

Bibliographic Details