Laser beam machine

Abstract

Abstract PURPOSE:To improve laser beam machining accuracy by providing an optical shifting means to shift a main beam of a laser luminous flux in the vertical direction so that it passes an optical axis of an objective lens corresponding to movement of the objective lens. CONSTITUTION:When the optical axis LX2 of the objective lens 3 is deviated by the dislocation quantity DIF in the axial direction to the optical axis LX1 of the laser luminous flux LB1, a system control part turns a parallel glass plate 21X for correcting the X position of an optical shifting part 21 in the arrow e1 direction. At this time, the laser luminous flux LB1 made incident on the parallel glass plate 21X is refracted at the time of passing the parallel glass plate 21X and the laser luminous flux LB1 emitted from the parallel glass plate 21X is shifted in the vertical direction up to the position where its optical axis is coincident with the optical axis LX2 of the objective lens 3. By this method, the main beam of the machining laser luminous flux is always projected on the work surface vertically and the machining accuracy can be improved.

Inventors

• 👤 Sunao Murata
• 👤 Kinya Kato

Bibliographic Details