Manufacture of array-type ultrasonic probe

Abstract

Abstract PURPOSE:To enable the accurate inspection of a defect, by using as an array- type ultrasonic probe a piezoelectric ceramic vibrator which is prepared by using an unpolarized ceramic substrate having a concave surface on one side and a flat surface on the other and by providing electrodes on these two surfaces for polarization processing. CONSTITUTION:A piezoelectric ceramic vibrator 21 is so shaped that the ultrasonic wave emitting surface thereof is concave while the back surface thereof is flat, and that it is thin in the central part and turns thick toward the end parts. The present probe is formed by providing an acoustic matching layer 22 on the concave part of the piezoelectric ceramic vibrator 21 and a packing material 23 on the flat back thereof. The piezoelectric ceramic vibrator 21 is prepared in such a manner that only one surface of an unpolarized ceramic substrate having a certain thickness is machined to be of a prescribed thickness so that it be a concave surface, and then electrodes are provided for polarization processing. Then, the acoustic matching layer 22 is formed on the ultrasonic wave emitting surface, and thus the array-type ultrasonic probe is obtained.

Inventors

• 👤 Shuji Suzuki
• 👤 Shiro Saito
• 👤 Mamoru Izumi
• 👤 Hiroki Honda

Bibliographic Details