Projection aligner

Abstract

Abstract PURPOSE:To enable the pattern transfer without forming actually a mask, by supplying a driving signal with the same pattern as a design pattern to the liquid crystal cell of a liquid crystal panel, and forming a light shielding region on the liquid crystal panel by the pattern. CONSTITUTION:Light from a light source 1 is converted to an uniform parallel light having a specified beam diameter by a first optical system 4, and radiated on a liquid panel 3. The light transmitted through the liquid panel 3 is converged on a wafer W surface on a wafer stage 2, by a second optical system 5. In the liquid crystal panel 3, liquid crystal 33 is sealed between two parallel quartz substrates 31, 32. On the inner side of one quartz substrate 31, a plurality of matrix type transparent electrodes 34 ... are formed. On the inner side of the other quartz substrate 32, a common transparent electrode 35 is formed. In this manner, liquid crystal groups C ... are constituted, and deflecting plates 36, 37 are so arranged on the outside that the mutual deflection axes become parallel with each other.

Inventors

• 👤 Toshiyuki Sato

Bibliographic Details