Production using single wafer carrier

Abstract

Abstract PURPOSE:To easily automate processing, transfer, stoking and containing of wafers among apparatuses having different numbers of the wafers to be processed and to improve operability at the time of transferring the wafer by providing a mechanism having a holder for holding and stocking one wafer and a box for containing it for automatically transferring the wafer to each apparatus. CONSTITUTION:A structure in which one wafer 4 is contained in an exclusive use cassette is formed, a contained wafer holder 1 is worked by separating it from a cassette body to obtain a sufficiently marginal working space. Thus, the opportunities of damaging a wafer and adhering a foreign matter are reduced. A containing box is sealed to protect the wafer in the box against contamination with work atmosphere or dust of transfer and stocking work. A standardized wafer transferring mechanism is provided in an apparatus for constructing a production line to largely shorten a production period to be effected by the influence by the apparatuses having different numbers of the wafers to be processed.

Inventors

• 👤 Takemasa Iwasaki
• 👤 Sadao Shimosha
• 👤 Haruo Otani

Bibliographic Details