Furnace tube

Abstract

Abstract PURPOSE:To prevent a lower part of a wafer loaded into a boat from being oxidized due to a creeping action of the air by a method wherein an inside diameter at least on the lower side of an opening on a handling side is shaped to be big. CONSTITUTION:At a core cylinder 1 an inside diameter of an opening on a handling side 2 is shaped to be gradually big toward the opening while its center is maintained on an axis identical to the center of the inside diameter of a uniformly heating zone 3. By this setup, even when a boat 5 is inserted and extracted, a creeping part 7 of the air is limited to a lower part of the boat 5; it is possible to prevent a wafer 6 from being oxidized due to a creeping action of the air. Because the inside diameter at least on the lower side of the opening on the handling side is shaped to be big in this manner, it is possible to prevent the wafer loaded into the boat from being oxidized due to the creeping action of the air.

Inventors

• 👤 Hitoshi Teshigahara

Bibliographic Details