Cryopump

Abstract

Abstract PURPOSE: To reduce the heat capacity to be cooled and shorten the pre-cooling time by forming the thickness of panels partially thin in a cryopump bringing the panels into contact with cold stages arranged in a vacuum tank and cooling the panels to the extremely low temperature. CONSTITUTION: Multiple cold stages 2, 3 are arranged in a vacuum tank 4 fitted with a refrigerator 1, and panels 5, 7 are fitted to the cold stages 2, 3 respectively. When the refrigerator 1 is operated, the cold stages 2, 3 are cooled respectively, and the panels 5, 7 are cooled via the cold stages 2, 3 respectively. In this cryopump, a panel stanchion 5a molded with a cross-shaped copper plate into a panel shape and a thin panel 5b molded into a recess shape so that this panel stanchion 5a can be inserted inside are connected to form one panel 5. The thickness of the panel 5 is thereby formed partially thin. COPYRIGHT: (C)1989,JPO&Japio

Inventors

• 👤 Norihide Saho
• 👤 Minoru Imamura
• 👤 Yukiyoshi Yoshimatsu

Bibliographic Details