Boat loader

Abstract

Abstract PURPOSE:To prevent phosphorus mist from scattering and propagating out of a boat loader by a method wherein an exhaust system is installed to suck and exhaust the phosphorus mist scattering from a boat and wafer furthermore when the boat, after heat treatment, is drawn out of the loader, clean air feeding function is stopped to initiate the exhaust fuction. CONSTITUTION:When a heat treated wafer is drawn out into a boat loader, hot air and phosphorus mist are lifted above the wafer as a rising stream. This air stream is exhausted out of a clean room through an exhaust punching sheet 16 provided on overall ceiling part in the boat shifting channel by an exhaust system 20 installed in the channel. Furthermore, at this time, the feeding of clean air from the punching sheet 16 is stopped and the exhaust system 20 is to be started by opening a damper 21 of the system 20. Through these procedures, the scattering of hot air and phosphorus mist from the front of the loader can be prevented from occurring not to pollute the inside of the clean room and not to notably deteriorate the performance of other products of the semiconductor device.

Inventors

• 👤 Shoichi Nakagawa
• 👤 Hidekazu Tsujii

Bibliographic Details