Vibration type angular velocity detecting device

Abstract

Abstract PURPOSE:To obtain a miniature device having a stable detection characteristic by a simple structure, by closing up tightly a vibration type angular velocity detector in a vacuum container, and eliminating a temperature change and a humidity change of the open air, and also, a viscous resistance. CONSTITUTION:To a case 2 of a vibration type angular velocity detector 10, a sub-container 4 is connected through a connecting tube 2a. In this container 4, a getter 5 is wired, and a terminal 6 for bringing the getter 5 to an electric conduction is drawn out to the outside of the container 4. Also, the inside of the container 4, and the case 2 is sucked by a vacuum pump, etc., from a suction pipe 4a formed in the container 4, and set to a vacuum state to some extent. Subsequently, the getter 5 is conducted electrically through the terminal 6 and the getter 5 is burned, and the inside of the container 4 and the case 2 is set to a high vacuum. Thereafter, the connecting tube 2a is cut and sealed, and the case 2 is closed up tightly. In such a way, since the inside of the case 2 becomes a high vacuum state, the detector 10 in the case 2 is not influenced by a temperature change and a humidity change of the open air without using a constant temperature oven, and also, a viscous resistance of air is reduced.

Inventors

• 👤 Takahiro Oikawa
• 👤 Junsuke Suzuki

Bibliographic Details