Manufacture of superconducting thin film

Abstract

Abstract PURPOSE:To improve the controllability and reproducibility of the composition by forming multiple metal laminated films on a substrate and heat-treating them in the oxidizing atmosphere to transform them into metal oxide films. CONSTITUTION:Laminated films of constituting metals (multiple kinds) 2-4 of an oxide superconductive material are formed on a substrate 1 then heated in the oxidizing atmosphere, thus causing the oxidation and diffusion reaction of the metal elements 2-4 to form an oxide superconducting thin film. The composition of the metal elements of the whole film can be correctly controlled by observing the thickness of each metal laminated film with a thickness monitor during the film formation, for example. Since the deposition of each metal element is continuously performed in series, the control of the film forming process is facilitated. The oxide superconducting thin film with high critical temperature can be thereby formed reproducibly, easily, and at a high speed.

Inventors

• 👤 Masaaki Futamoto
• 👤 Yukio Honda
• 👤 Teruaki Takeuchi

Bibliographic Details