Method for detecting resist

Abstract

Abstract PURPOSE:To easily and surely detect a resist by utilizing a fact in which a resist emits an extremely small quantity of a fluorescence, and stimulating the fluorescence to more than a detecting limit by means of a fluorescence stimulating means, followed by detecting the stimulated fluorescence. CONSTITUTION:A stimulated light coming from the fluorescence stimulating means 1 is radiated on a wafer 2, and when the resist 3 exists on the wafer 2, the fluorescence coming from the resist 3 is stimulated by the stimulated light, and the only stimulated fluorescence transmits through a filter 4 which selectively transmits the fluorescence. The transmitted fluorescence is detected by a fluorescence detecting means 5, thereby deciding whether the resist 3 exists or not. Thus, whether the resist 3 exists on the wafer 2 or not, can be easily and surely decided by stimulating the fluorescence generated in the only case that the resist 3 exists on the wafer 2, followed by detecting it.

Inventors

• 👤 Hideaki Ozawa

Bibliographic Details