Method and device for cleaning air by ultraviolet ray irradiation

Abstract

Abstract PURPOSE:To increase the irradiation efficiency of UV rays by projecting UV rays on a photoelectron emitting material through an optical fiber to charge the fine particles in the air by the emitted photoelectron, and then removing the charged fine particles from the air. CONSTITUTION:The air having about 10,000 cleanliness factor in a clean room 1 is sucked by the fan in a fan part 8 in a clean bench 11. UV rays are emitted in an UV ray irradiation part 9, and the fine particles in the air are charged. The microbes such as viruses and bacteria are simultaneously sterilized, then the charged fine particles are removed by a filter 10, and high cleanliness can be kept on a working bench 13. The charge and discharge of instruments, products, etc., to and from the working bench 13 in the clean bench 11 are carried out by the movable shutter 12 provided to the clean bench 11.

Inventors

• 👤 Toshiaki Fujii
• 👤 敏昭 藤井

Bibliographic Details