Optical connecting circuit

Abstract

Abstract PURPOSE:To precisely and easily align an optical waveguide and optical fiber by using such a positioning V groove which has the central axis coaxial with the axis of the optical waveguide and one end of which constitutes the lower part of the optical waveguide. CONSTITUTION:The V groove 3 for positioning an optical element which has the central axis coaxial with the central axis of the optical waveguide 2 formed on a silicon substrate 1 and one end of which constitutes the lower part of the waveguide 2 is formed on said substrate. Such grooving is executable by a laser assisted etching method of immersing the substrate 1 into KOH liquid and projecting the laser beam from an Ar laser to the substrate 1. The end face of the waveguide 2 and the end face of the optical fiber 4 or waveguide type semiconductor device can be brought into tight contact with each other if the V groove 3 formed to such geometry is used. The precise and easy alignment of the waveguide and the fiber is thus permitted.

Inventors

• 👤 Toshiya Miyagawa
• 👤 俊哉 宮川

Bibliographic Details