Patent JPS6388682A successfully refreshed from Google Patents.
JPS6388682A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method and apparatus for detecting defect in object
Assignee: KLA Corp
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Filing: 1987-07-14
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Granted: —
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Expires: 2007-07-14
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 ドナルド・エフ・スペチト
- 👤 テイム・エス・ウイール
- 👤 スコツト・エイ・ヤング
- 👤 ジエームズ・ジエイ・ヘーガー，ジユニア
- 👤 マシユー・ビイ・ラツカー
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 21:27
CPC Classifications
G; G06; G06T; G06T7/00; G06T7/0002; G06T7/0004; G06T7/001; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/956; G01N21/95607; G06T7/30; G06T7/32; G06T2207/00; G06T2207/10; G06T2207/10056; G06T2207/30; G06T2207/30108; G06T2207/30148
Claims Analysis
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References Cited (Backward Citations)
JPS6159575A
Cited
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