Pressure container for storing high purity gas

Abstract

Abstract PURPOSE:To surely remove impure gas, by arranging a packed bed of an impure gas adsorbent upstream of a valve so that the high purity gas flowing between the space in a container and the outlet of the container passes through the packed bed. CONSTITUTION:A supply and discharge pipe 2 equipped with a valve V is connected to a pressure container 1 and a porous container 3 composed of a punching metal or a metal net is mounted to the pressure container 1 in a state positioned therein and a packed bed 4 composed of an impure gas adsorbent is formed in the container 3 so as to allow the high purity gas flowing between the space 5 in the container 1 and the outlet 6 of the container 1 to pass through the packed bed 4 and impure gas is surely removed.

Inventors

• 👤 Masamichi Ipponmatsu
• 👤 正道 一本松
• 👤 Osamu Kajikawa
• 👤 梶川　修
• 👤 Masaru Matsumoto
• 👤 勝 松本
• 👤 Masao Wada
• 👤 和田　昌夫
• 👤 Masaki Kimura
• 👤 木村　正城

Bibliographic Details