Production of information recording medium

Abstract

Abstract PURPOSE:To shorten the time for presputtering and to improve the reproducibility of the deposition process for a recording film by cleaning a target by two stages of the presputterings using a rare gas contg. a specific ratio of O2 and a rare gas. CONSTITUTION:The inside of a vacuum vessel 1 is evacuated and the target 4 consisting preferably of In or Te is first cleaned by the two stages of the 1st presputtering by the rare gas (e.g.: Ar) contg. 2-40% O2 and the 2nd presputtering by 100% rare gas. The recording film is then formed on the substrate on a holder 5 by the plasma sputtering of the gas contg. at least hydrocarbon (e.g.: CH4). The recording film having the uniform recording and reproducing characteristics is efficiently obtd. by the above-mentioned method.

Inventors

• 👤 Yoshikatsu Takeoka
• 👤 竹岡　美勝
• 👤 Norio Ozawa
• 👤 小沢　則雄
• 👤 Noburo Yasuda
• 👤 安田　修朗

Bibliographic Details