Manufacture of optical disk recording medium
Abstract
Abstract PURPOSE:To uniformize the depth and the shape of a guide groove, and to improve an S/N, by applying a prescribed time of exposure to ultraviolet rays and baking processing, after forming a groove having a rectangular cross section by using an exposing and developing means, and forming the guide groove. CONSTITUTION:A photoresist film 1 is coated evenly on the surface of a glass plate 2 whose surface is cleaned, and next, the photoresist film 1 formed on the surface of the glass plate 2 is exposed in a spiral shape, or a concentric circle shape, by a condensed laser beam, and it is developed, then an exposed part is eliminated, and a rectangular groove 3 is formed. Next, an original board on which the rectangular groove 3 is formed, is heated in a baking furnace, etc. By the above heating, the fluidity is attached on the photoresist 1 after developing, and the corner part of the photoresist film 1 falls in drops, and flows in the rectangular groove 3, and an angle shaped photoresist film 4 is formed by embedding the rectangular groove 3, and a valley part forms a V-shape. In this way, surface coarseness is reduced, and the S/N can be improved, and also, since it is possible to uniformize the depth and the shape of the guide groove, the quality of a product can be improved.
Inventors
- 👤 Hiroshi Nagate
- 👤 弘 長手
- 👤 Masumi Fujita
- 👤 藤田 真純
Bibliographic Details
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